Mr. Takumi Toida Profile

Takumi Toida

at Mitsubishi Gas Chemical Co Inc

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Author

Publications (3)

Proceedings Article | 3 October 2018 Paper

EUV sensitizer for resists and spin-on-carbon materials

Takashi Sato, Yuta Togashi, Sachiko Shinjo, Takumi Toida, Takashi Makinoshima, Masatoshi Echigo

Proceedings Volume 10809, 108091X (2018) https://doi.org/10.1117/12.2323096

KEYWORDS: Extreme ultraviolet, Absorption, Transmittance, Chemical elements, Iodine, Extreme ultraviolet lithography, Mass attenuation coefficient, Resist chemistry

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Proceedings Article | 16 October 2017 Paper

Development of the negative-tone molecular resists for EB/EUVL having high EUV absorption capacity and molecular design method

Takashi Sato, Tomoaki Takigawa, Yuta Togashi, Takumi Toida, Masatoshi Echigo, Tetsuo Harada, Takeo Watanabe, Hiroto Kudo

Proceedings Volume 10450, 104501H (2017) https://doi.org/10.1117/12.2280514

KEYWORDS: Extreme ultraviolet, Absorption, Extreme ultraviolet lithography, Lithography

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Proceedings Article | 20 March 2015 Paper

Development of new xanthendiol derivatives applied to the negative-tone molecular resists for EB/EUVL

Takumi Toida, Akihiro Suzuki, Naoya Uchiyama, Takashi Makinoshima, Masaaki Takasuka, Takashi Sato, Masatoshi Echigo

Proceedings Volume 9425, 94251L (2015) https://doi.org/10.1117/12.2085470

KEYWORDS: Industrial chemicals, Raw materials, Chemical analysis, Line edge roughness, Extreme ultraviolet lithography, Electron beam lithography, Semiconducting wafers, Lithography, Optical lithography, Scanning electron microscopy

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