Dr. Xiaolong Lang Profile

Dr. Xiaolong Lang

at Brewer Science Inc

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Publications (1)

Proceedings Article | 25 May 2022 Presentation + Paper

Realization of sub-30-pitch EUV lithography through the application of functional spin-on glass

Yichen Liang, Kelsey Brakensiek, Joyce Lowes, Andrea Chacko, Ruimeng Zhang, Veerle Van Driessche, Xiaolong Lang, Jaishankar Kasthuri, Ming Luo, Douglas Guerrero

Proceedings Volume 12055, 120550A (2022) https://doi.org/10.1117/12.2610985

KEYWORDS: Extreme ultraviolet lithography, Adhesives, Polymers, Etching, Plasma etching, Optical lithography, Semiconducting wafers

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