Dr. Yichen Liang Profile

Dr. Yichen Liang

Lead Materials Scientist at Magic Leap Inc

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 25 May 2022 Presentation + Paper

Realization of sub-30-pitch EUV lithography through the application of functional spin-on glass

Kelsey Brakensiek, Joyce Lowes, Andrea Chacko, Ruimeng Zhang, Veerle Van Driessche, Xiaolong Lang, Jaishankar Kasthuri, Ming Luo, Douglas Guerrero, Yichen Liang

Proceedings Volume 12055, 120550A (2022) https://doi.org/10.1117/12.2610985

KEYWORDS: Extreme ultraviolet lithography, Adhesives, Polymers, Etching, Plasma etching, Optical lithography, Semiconducting wafers

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Proceedings Article | 23 March 2020 Presentation + Paper

Underlayer optimization method for EUV lithography

Andrea Chacko, Pieter Vanelderen, Nadia Vandenbroeck, Danilo De Simone, Geert Vandenberghe, Yichen Liang, Veerle Van Driessche, Douglas Guerrero

Proceedings Volume 11326, 1132615 (2020) https://doi.org/10.1117/12.2551684

KEYWORDS: Photoresist materials, Extreme ultraviolet lithography, Lithography, Stochastic processes, Line width roughness, Extreme ultraviolet, Optical lithography, Photoresist developing

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