Mr. Yuhei Sakaguchi Profile

Yuhei Sakaguchi

at HORIBA STEC

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 14 May 2007 Paper

Real-time trace ambient ammonia monitor for haze prevention

Katsumi Nishimura, Yuhei Sakaguchi, Eric Crosson, Edward Wahl, Chris Rella

Proceedings Volume 6607, 66071Y (2007) https://doi.org/10.1117/12.728981

KEYWORDS: Air contamination, Ions, Semiconductors, Absorption, Photomasks, Lithography, Gases, Chromatography, Optical lithography, Contamination

Read Abstract +

Proceedings Article | 20 October 2006 Paper

Real-time ultra-sensitive ambient ammonia monitor for advanced lithography

Eric Crosson, Katsumi Nishimura, Yuhei Sakaguchi, Chris Rella, Edward Wahl

Proceedings Volume 6349, 63492R (2006) https://doi.org/10.1117/12.692934

KEYWORDS: Ions, Lithography, Optical lithography, Semiconductors, Chromatography, Absorption, Semiconducting wafers, Spatial light modulators, FT-IR spectroscopy, Microsoft Foundation Class Library

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years