Dr. Chris W. Rella Profile

Dr. Chris W. Rella

at Picarro Inc

SPIE Involvement:

Author

Publications (13)

Proceedings Article | 26 May 2022 Poster + Paper

Chemical metrology: a novel approach to measuring critical airborne molecular contamination in photolithography and track tools in real-time

Fabin Shakila, Sanjay Yedur, Jeffrey Headrick, Chris Rella, Feng Dong, Craig Haupt

Proceedings Volume 12053, 1205326 (2022) https://doi.org/10.1117/12.2614269

KEYWORDS: Reticles, Scanners, Optical filters, Contamination, Metrology, Lithography, Chemical analysis, Semiconducting wafers, Optical lithography, Statistical analysis

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Proceedings Article | 26 May 2022 Poster + Paper

Real-time monitoring of critical AMC compounds in the photolithography cell using a novel laser-based, multi-species detection system

Sandhya Gopalakrishnan, Fabin Shakila, Jeffrey Headrick, Chris Rella, Heiko Abt, Michael Toepper

Proceedings Volume 12053, 1205323 (2022) https://doi.org/10.1117/12.2614150

KEYWORDS: Reticles, Optical filters, Scanners, Chemical analysis, Optical lithography, Semiconducting wafers, Metrology, Spectroscopy, Contamination, Lithography

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Proceedings Article | 26 May 2022 Poster + Paper

Real-time monitoring of acetic acid and PGMEA in a photolithographic multifunction chemical filter using a laser-based multi-species VOC analyzer

Charlotte Pouligny, Vivien Carlini, Laura McHale, Chris Rella, Kai Skog, Fabin Shakila, Ambre Steiner, Thomas Vitrani

Proceedings Volume 12053, 1205321 (2022) https://doi.org/10.1117/12.2614119

KEYWORDS: Chemical analysis, Semiconductors, Optical lithography, Scanners, Optical filters, Air contamination, Absorption, Photoresist materials, Ions, Calibration

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Proceedings Article | 14 May 2007 Paper

Real-time trace ambient ammonia monitor for haze prevention

Katsumi Nishimura, Yuhei Sakaguchi, Eric Crosson, Edward Wahl, Chris Rella

Proceedings Volume 6607, 66071Y (2007) https://doi.org/10.1117/12.728981

KEYWORDS: Air contamination, Ions, Semiconductors, Absorption, Photomasks, Lithography, Gases, Chromatography, Optical lithography, Contamination

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Proceedings Article | 20 October 2006 Paper

Real-time ultra-sensitive ambient ammonia monitor for advanced lithography

Eric Crosson, Katsumi Nishimura, Yuhei Sakaguchi, Chris Rella, Edward Wahl

Proceedings Volume 6349, 63492R (2006) https://doi.org/10.1117/12.692934

KEYWORDS: Ions, Lithography, Optical lithography, Semiconductors, Chromatography, Absorption, Semiconducting wafers, Spatial light modulators, FT-IR spectroscopy, Microsoft Foundation Class Library

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Proceedings Article | 8 July 2004 Paper

Moving solid state cyan lasers beyond 20 mW

Guido Knippels, S. Koulikov, Boris Kharlamov, G. Vacca, Chris Rella, Bruce Richman, Alex Kachanov, Sze Tan, Edward Wahl, H. Pham, Eric Crosson

Proceedings Volume 5332, (2004) https://doi.org/10.1117/12.538043

KEYWORDS: Semiconductor lasers, Laser vision correction, Solid state lasers, Crystals, Resonance enhancement, Laser applications, Solid state physics, Second-harmonic generation, Monochromatic aberrations, Laser marking

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Proceedings Article | 16 October 1997 Paper

Picosecond infrared studies of protein vibrational modes: the amide I mode of myoglobin

Kristen Peterson, James Engholm, Chris Rella, H. Alan Schwettman

Proceedings Volume 3153, (1997) https://doi.org/10.1117/12.290259

KEYWORDS: Picosecond phenomena, Proteins, Free electron lasers, Absorption, Infrared radiation, Hydrogen, Metals, Glasses, Temperature metrology, Infrared spectroscopy

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Proceedings Article | 16 October 1997 Paper

Picosecond processes studied using time-resolved spectroscopic techniques and a pulsed free electron laser

James Engholm, Chris Rella, H. Alan Schwettman

Proceedings Volume 3153, (1997) https://doi.org/10.1117/12.279377

KEYWORDS: Free electron lasers, Spectroscopy, Quantum wells, Picosecond phenomena, Second-harmonic generation, Absorption, Oscillators, Light sources, Harmonic generation, Gallium arsenide

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Proceedings Article | 27 July 1994 Paper

FEL-FTIR spectroscopy of matrix-isolated formic acid

Don Henderson, Richard Mu, Enrique Silberman, Kenneth Berryman, Chris Rella

Proceedings Volume 2138, (1994) https://doi.org/10.1117/12.181346

KEYWORDS: Argon, Free electron lasers, Hole burning spectroscopy, Neon, Infrared radiation, Molecules, Infrared spectroscopy, Matrices, Radiation effects, Solids

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Proceedings Article | 11 May 1994 Paper

Second harmonic generation in p-type GaAs quantum wells

Zhiwei Xu, Jury Vandyshev, Gary Wicks, Philippe Fauchet, Mike Shaw, Milan Jaros, Bruce Richman, Chris Rella, H. Alan Schwettman

Proceedings Volume 2139, (1994) https://doi.org/10.1117/12.175709

KEYWORDS: Quantum wells, Gallium arsenide, Second-harmonic generation, Harmonic generation, Free electron lasers, Electrons, Polarization, X-ray diffraction, Luminescence, X-rays

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Proceedings Article | 11 May 1994 Paper

Free-electron laser nonlinear spectroscopy of doubly resonant (5.5-3.0um and 4.1-2.1 um)InGaAs/AlGaAs asymmetric quantum wells

Eric Martinet, Gary Woods, Herman Chui, James Harris, Martin Fejer, Chris Rella, Bruce Richman

Proceedings Volume 2139, (1994) https://doi.org/10.1117/12.175710

KEYWORDS: Quantum wells, Second-harmonic generation, Gallium arsenide, Absorption, Free electron lasers, Indium, Spectroscopy, Indium gallium arsenide, Polarization, Laser spectroscopy

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Proceedings Article | 14 July 1993 Paper

Picosecond nonlinear optics in semiconductor quantum wells with SCA free-electron laser

Zhiwei Xu, Li Zheng, Jury Vandyshev, Gary Wicks, Philippe Fauchet, Bruce Richman, Chris Rella

Proceedings Volume 1854, (1993) https://doi.org/10.1117/12.148047

KEYWORDS: Quantum wells, Second-harmonic generation, Gallium arsenide, Free electron lasers, Absorption, Picosecond phenomena, Nonlinear optics, Crystals, Semiconductors, Mid-IR

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Proceedings Article | 14 July 1993 Open Access

FEL microscopy for the investigation of transient local heating in single living cells

Bruce Tromberg, K. Peterson, Tatiana Krasieva, Satoshi Shimizu, Chris Rella, Andrew Jeung, Curtis Chapman, Dana Dlott, Michael Fayer, H. Alan Schwettman, Michael Berns

Proceedings Volume 1854, (1993) https://doi.org/10.1117/12.148038

KEYWORDS: Free electron lasers, Luminescence, Microscopes, Infrared radiation, FT-IR spectroscopy, Microscopy, Absorption, Picosecond phenomena, Molecules, Laser beam diagnostics

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