Mr. Chikashi Ito Profile

Chikashi Ito

Technical Expert at KLA Japan

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Author

Publications (2)

SPIE Journal Paper | 2 July 2015

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana, Nadia Vandenbroeck, Dieter Van den Heuvel, Lieve Van Look, Paulina Rincon-Delgadillo, Yi Cao, JiHoon Kim, Guanyang Lin, Doni Parnell, Kathleen Nafus, Ryota Harukawa, Ito Chikashi, Marco Polli, Lucia D’Urzo, Roel Gronheid, Paul Nealey

JM3, Vol. 14, Issue 03, 031204, (July 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.3.031204

KEYWORDS: Etching, Scanning electron microscopy, Silicon, Inspection, Semiconducting wafers, Diffractive optical elements, Defect inspection, Thin film coatings, Directed self assembly

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Proceedings Article | 28 March 2014 Paper

Inspection of directed self-assembly defects

Chikashi Ito, Stephane Durant, Steve Lange, Ryota Harukawa, Takemasa Miyagi, Venkat Nagaswami, Paulina Rincon Delgadillo, Roel Gronheid, Paul Nealey

Proceedings Volume 9049, 90492D (2014) https://doi.org/10.1117/12.2046634

KEYWORDS: Inspection, Signal to noise ratio, Etching, Semiconducting wafers, Silicon, Wafer inspection, Defect inspection, Line edge roughness, Wafer-level optics, Directed self assembly

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