Dr. Erik Novak Profile

Dr. Erik Novak

at 4D Technology Corp

SPIE Involvement:

Editor | Author

Publications (32)

Proceedings Article | 9 September 2021 Open Access

A career working with Jim Wyant

Erik Novak, James Millerd, Neal Brock

Proceedings Volume 11813, 1181309 (2021) https://doi.org/10.1117/12.2571271

KEYWORDS: Semiconductors, Metrology, Interferometry, Interferometers, Packaging, National Ignition Facility, Mirrors, Eye, Data storage, Semiconductor materials

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Proceedings Article | 3 September 2019 Presentation + Paper

3D shop floor characterization of radii and chamfers

Erik Novak, Kramer Lindell, Jared Wheeler

Proceedings Volume 11102, 1110212 (2019) https://doi.org/10.1117/12.2530693

KEYWORDS: 3D metrology, Structured light, Cameras, Fringe analysis, Polarization, Imaging systems, Polarizers, Interferometry, Visualization, Projection systems

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Proceedings Article | 7 September 2018 Paper

Inspection of mechanical surfaces with polarized structured light

Joanna Schmit, Erik Novak, Shawn McDermed

Proceedings Volume 10834, 108342F (2018) https://doi.org/10.1117/12.2322178

KEYWORDS: Structured light, Inspection, 3D metrology, Fringe analysis, Polarization, Interferometry

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Proceedings Article | 14 May 2018 Presentation + Paper

Hand portable 3D mapper applied to pit quantification on aerospace parts

Erik Novak, Shawn McDermed , Kevin Harding

Proceedings Volume 10667, 106670I (2018) https://doi.org/10.1117/12.2309580

KEYWORDS: Phase shifts, Polarization, 3D metrology, Aerospace engineering, Metals, Structured light, Inspection, Spatial resolution, Additive manufacturing, Mirrors

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SPIE Journal Paper | 8 September 2017 Open Access

Special Section Guest Editorial: Interferometry

Peter de Groot, Erik Novak

OE, Vol. 56, Issue 11, 111701, (September 2017) https://doi.org/10.1117/12.10.1117/1.OE.56.11.111701

KEYWORDS: Interferometry, Metrology, Optical engineering, Interferometers, Optics manufacturing, Microscopy, Distance measurement, Physics, Optical fabrication, Speckle

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Proceedings Article | 23 August 2017 Presentation + Paper

Vibration-immune compact optical metrology to enable production-line quantification of fine scale features

Erik Novak

Proceedings Volume 10373, 103730B (2017) https://doi.org/10.1117/12.2276056

KEYWORDS: Inspection, Optical metrology, Metrology, Interferometry, Optical inspection, Visualization, 3D metrology, In situ metrology, Image resolution, Optical resolution

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Proceedings Article | 3 September 2015 Paper

In-line roll-to-roll metrology for flexible electronics

Brad Kimbrough

Proceedings Volume 9576, 957603 (2015) https://doi.org/10.1117/12.2189905

KEYWORDS: Metrology, Flexible circuits, 3D metrology, Interferometry, Cameras, Manufacturing, Inspection, Reflection, Surface roughness, Interferometers

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Proceedings Article | 18 August 2014 Paper

Artifact-free calibration of spatial carrier interferometry

Brad Kimbrough, Korbinian Prause, Erik Novak

Proceedings Volume 9204, 920407 (2014) https://doi.org/10.1117/12.2060559

KEYWORDS: Calibration, Interferometry, Wavefronts, Interferometers, Environmental sensing, Spherical lenses, Optical spheres, Zernike polynomials, Optical testing, Precision measurement

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Proceedings Article | 28 May 2014 Paper

Advanced defect and metrology solutions

Erik Novak

Proceedings Volume 9110, 91100G (2014) https://doi.org/10.1117/12.2052934

KEYWORDS: 3D metrology, Metrology, Manufacturing, Standards development, 3D imaging standards, Inspection, Interferometry, 3D modeling, Radium, Aerospace engineering

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Proceedings Article | 20 April 2011 Paper

TSOM method for semiconductor metrology

Ravikiran Attota, Ronald Dixson, John Kramar, James Potzick, András Vladár, Benjamin Bunday, Erik Novak, Andrew Rudack

Proceedings Volume 7971, 79710T (2011) https://doi.org/10.1117/12.881620

KEYWORDS: Silicon, Overlay metrology, Scanning electron microscopy, Optical microscopes, Metrology, 3D acquisition, 3D metrology, Polarization, 3D modeling, Photomasks

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Proceedings Article | 17 June 2009 Paper

Ball bearing measurement with white light interferometry

Joanna Schmit, Sen Han, Erik Novak

Proceedings Volume 7389, 73890P (2009) https://doi.org/10.1117/12.828113

KEYWORDS: Gaussian filters, Surface roughness, Surface finishing, 3D metrology, Ceramics, Microscopes, Optical interferometry, Metrology, Optical testing, Standards development

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Proceedings Article | 27 December 2007 Paper

Biological applications of microscope profiler

Sen Han, Erik Novak, Jason Reed, Michael Teitell, James Gimzewski

Proceedings Volume 6799, 67990L (2007) https://doi.org/10.1117/12.756806

KEYWORDS: Microscopes, Interferometry, Biosensors, Objectives, Interferometers, Mirrors, Microelectromechanical systems, Biomedical optics, Protactinium, Profiling

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Proceedings Article | 18 June 2007 Paper

Interference microscopes for tribology and corrosion quantification

Erik Novak, Tom Stout

Proceedings Volume 6616, 66163B (2007) https://doi.org/10.1117/12.728053

KEYWORDS: Corrosion, Surface finishing, Microscopes, Metrology, Environmental sensing, Surface roughness, Spatial frequencies, Radium, Silicon carbide, In situ metrology

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Proceedings Article | 22 January 2005 Paper

MEMS metrology techniques

Erik Novak

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.596989

KEYWORDS: Microelectromechanical systems, Metrology, Motion measurement, Scanning electron microscopy, Digital holography, Microscopes, Doppler effect, 3D metrology, Confocal microscopy, Measurement devices

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Proceedings Article | 22 January 2005 Paper

Surface profiler for fixed through-glass measurement

Sen Han, Erik Novak, John Wissinger, Bryan Guenther, Trisha Browne, Emilio Yanine, Michael Schurig, J. Herron, Christy McCloy, Xueyuan Li, Michael Krell, Jim Harris

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.597080

KEYWORDS: Glasses, Microelectromechanical systems, Interferometry, Profilometers, Objectives, Mirrors, Tolerancing, Microopto electromechanical systems, Silicon, Image quality standards

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Proceedings Article | 17 August 2004 Paper

Three-dimensional dynamic environmental MEMS characterization

Erik Novak

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.546646

KEYWORDS: Microelectromechanical systems, Interferometry, Optical switching, Switches, Glasses, Environmental sensing, Pulsed laser operation, Measurement devices, Motion measurement, Photovoltaics

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Proceedings Article | 22 December 2003 Paper

Calibration of high-speed optical profiler

Joanna Schmit, Michael Krell, Erik Novak

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.504930

KEYWORDS: Calibration, Scanners, Interferometers, Interferometry, Optical calibration, Signal detection, Motion measurement, Objectives, Standards development, Optical filters

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Proceedings Article | 22 December 2003 Paper

Dynamic MEMS measuring interferometric microscope

Erik Novak, Michael Schurig

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.506487

KEYWORDS: Microelectromechanical systems, Metrology, Cameras, Light emitting diodes, Microscopes, Interferometry, Interferometers, Image segmentation, 3D metrology, Measurement devices

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Proceedings Article | 20 November 2003 Paper

Improved shape measurement in optical profiler

Joanna Schmit, Erik Novak

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.506946

KEYWORDS: Scanners, Calibration, Interferometry, Signal detection, Standards development, Motion measurement, Helium neon lasers, Optical testing, Objectives, Interferometers

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Proceedings Article | 30 May 2003 Paper

Application of grazing incidence interferometer to rough surface measurement

Sen Han, Erik Novak, Joseph Sullivan

Proceedings Volume 5144, (2003) https://doi.org/10.1117/12.500108

KEYWORDS: Grazing incidence, Interferometers, Error analysis, Wavefronts, Glasses, Interferometry, Collimation, Optical spheres, Phase shifting, Photovoltaics

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Proceedings Article | 30 January 2003 Paper

Ritchey-Common test used for measurement of astronomical optic

Sen Han, Erik Novak, Mike Schurig

Proceedings Volume 4842, (2003) https://doi.org/10.1117/12.457001

KEYWORDS: Interferometers, Optical spheres, Mirrors, Optical testing, Wavefronts, Astronomical imaging, Astronomy, Monochromatic aberrations, Photovoltaics, Metrology

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Proceedings Article | 16 January 2003 Paper

Template-based software for accurate MEMS characterization

Erik Novak, Michael Krell, Trisha Browne

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478204

KEYWORDS: Microelectromechanical systems, Image segmentation, Metrology, Measurement devices, Sensors, Micromirrors, Microscopes, Error analysis, Interferometry, Motion measurement

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Proceedings Article | 3 October 2001 Paper

Application of Ritchey-Common test in large flat measurements

Sen Han, Erik Novak, Mike Schurig

Proceedings Volume 4399, (2001) https://doi.org/10.1117/12.445584

KEYWORDS: Wavefronts, Interferometers, Optical spheres, Mirrors, Optical testing, Surface finishing, Astronomical imaging, Monochromatic aberrations, Photovoltaics, Metrology

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Proceedings Article | 6 October 2000 Paper

High-accuracy absolute flatness testing using a commercial interferometer

Sen Han, Erik Novak

Proceedings Volume 4231, (2000) https://doi.org/10.1117/12.402815

KEYWORDS: Reticles, Interferometry, Interferometers, Calibration, Platinum, Error analysis, Optical testing, Photovoltaics, Evolutionary algorithms, Radium

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Proceedings Article | 21 March 2000 Paper

Design of an interferometer for the measurement of long radius optics

Sen Han, Joseph Lamb, Artur Olszak, Erik Novak

Proceedings Volume 3966, (2000) https://doi.org/10.1117/12.380092

KEYWORDS: Interferometers, Monochromatic aberrations, LIGO, Distortion, Collimators, Metrology, Mirrors, Optical design, Imaging systems, Pellicles

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Proceedings Article | 17 August 1999 Paper

High-performance interferometer for site flatness inspection

Artur Olszak, Erik Novak, Ken Stumpe, James Semrad

Proceedings Volume 3745, (1999) https://doi.org/10.1117/12.357804

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Proceedings Article | 19 July 1999 Paper

Retrace error for the measurement of a long-radius optic

Sen Han, Erik Novak

Proceedings Volume 3749, (1999) https://doi.org/10.1117/12.354906

KEYWORDS: Fringe analysis, Error analysis, Photovoltaics, Collimators, Phase shifting, Interferometers, Optical components, Optics manufacturing, Monochromatic aberrations, Optical alignment

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Proceedings Article | 29 March 1999 Paper

Laser Fizeau interferometer for silicon wafer site flatness testing

Erik Novak, Artur Olszak, Ken Stumpe, Robert Knowlden, Leonid Malevanchik, George Angeli

Proceedings Volume 3619, (1999) https://doi.org/10.1117/12.343704

KEYWORDS: Semiconducting wafers, Silicon, Wafer testing, Photovoltaics, Fizeau interferometers, Interferometers, Metrology, Imaging systems, Semiconductor lasers, Laser metrology

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Proceedings Article | 8 December 1997 Paper

Optical and mechanical design considerations in the construction of a 24-in. phase-shifting interferometer

Joseph Lamb, James Semrad, James Wyant, Chiayu Ai, Robert Knowlden, Erik Novak, John Downie, Robert Wolfe

Proceedings Volume 3047, (1997) https://doi.org/10.1117/12.294328

KEYWORDS: Interferometers, Phase shifts, Imaging systems, Collimators, Optics manufacturing, Optical design, Phase shifting, Fourier transforms, Mechanical engineering, Laser sources

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Proceedings Article | 1 November 1997 Paper

Transfer function characterization of laser Fizeau interferometer for high-spatial-frequency phase measurements

Erik Novak, Chiayu Ai, James Wyant

Proceedings Volume 3134, (1997) https://doi.org/10.1117/12.295123

KEYWORDS: Spatial frequencies, Interferometers, Relays, Phase measurement, National Ignition Facility, Coherence imaging, Fizeau interferometers, Imaging systems, Zoom lenses, Phase shift keying

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Proceedings Article | 1 November 1997 Paper

Errors caused by nearly parallel optical elements in a laser Fizeau interferometer utilizing strictly coherent imaging

Erik Novak, Chiayu Ai, James Wyant

Proceedings Volume 3134, (1997) https://doi.org/10.1117/12.295146

KEYWORDS: Glasses, Imaging systems, Optical components, Diffusers, Coherence imaging, Fizeau interferometers, Phase measurement, Cameras, Charge-coupled devices, Coating

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Proceedings Article | 20 November 1996 Paper

Optical resolution of phase measurements of laser Fizeau interferometer

Erik Novak, Chiayu Ai, James Wyant

Proceedings Volume 2870, (1996) https://doi.org/10.1117/12.259942

KEYWORDS: Spatial frequencies, Coherence imaging, Relays, Interferometers, Imaging systems, Silica, Fizeau interferometers, Phase measurement, Phase shift keying, Wave propagation

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Showing 5 of 32 publications

Proceedings Volume Editor (13)

SPIE Conference Volume | 16 October 2023

Applied Optical Metrology V

SPIE Conference Volume | 30 August 2021

Applied Optical Metrology IV

SPIE Conference Volume | 4 November 2019

Applied Optical Metrology III

SPIE Conference Volume | 11 December 2017

Applied Optical Metrology II

SPIE Conference Volume | 10 September 2015

Applied Advanced Optical Metrology Solutions

Showing 5 of 13 publications

Conference Committee Involvement (19)

Applied Optical Metrology V

22 August 2023 | San Diego, California, United States

Applied Optical Metrology IV

4 August 2021 | San Diego, California, United States

Applied Optical Metrology III

13 August 2019 | San Diego, California, United States

Applied Optical Metrology II

8 August 2017 | San Diego, California, United States

Interferometry XVIII

30 August 2016 | San Diego, California, United States

Applied Advanced Optical Metrology Solutions

11 August 2015 | San Diego, California, United States

Interferometry XVII: Advanced Applications

19 August 2014 | San Diego, California, United States

Interferometry XVI: Applications

14 August 2012 | San Diego, California, United States

Interferometry XV: Applications

3 August 2010 | San Diego, California, United States

Interferometry XV: Techniques and Analysis

2 August 2010 | San Diego, California, United States

Interferometry XIV: Applications

13 August 2008 | San Diego, California, United States

Interferometry XIV: Techniques and Analysis

11 August 2008 | San Diego, California, United States

Optical Measurement Systems for Industrial Inspection

18 June 2007 | Munich, Germany

Interferometry XIII: Applications

16 August 2006 | San Diego, California, United States

Interferometry XIII: Techniques and Analysis

14 August 2006 | San Diego, California, United States

Nanofabrication: Technologies, Devices, and Applications II

23 October 2005 | Boston, MA, United States

Optical Measurement Systems for Industrial Inspection IV

13 June 2005 | Munich, Germany

Interferometry XII: Applications

4 August 2004 | Denver, Colorado, United States

Interferometry XII: Techniques and Analysis

2 August 2004 | Denver, Colorado, United States

Showing 5 of 19 Conference Committees

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