Mr. Frederick R. Peiffer Profile

Frederick R. Peiffer

Technical Staff Member at Broadcom Inc

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 8 November 2005 Paper

Technical summary for the Foundry Data eXchange system

Christopher Braun, Gerry Krupka, Frederick Peiffer, Thomas Polk, Evelyn Roadcap, John Sosik, Gregory Van Allen, William Wilkinson

Proceedings Volume 5992, 59923O (2005) https://doi.org/10.1117/12.632243

KEYWORDS: Photomasks, Manufacturing, Integrated circuits, Databases, Semiconducting wafers, Photomask technology, Prototyping, Control systems, Data modeling, Integrated circuit design

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Proceedings Article | 27 December 1996 Paper

Lithography tricks and tribulations

Joseph Garofalo, Pat Watson, Lee Trimble, Raymond Cirelli, Albert Colina, Ilya Grodnensky, B. Herrero, A. Dunbar, Frederick Peiffer, R. Takahashi, Regine Tarascon-Auriol, Willie Yarbrough, Ludwik Zych

Proceedings Volume 2884, (1996) https://doi.org/10.1117/12.262814

KEYWORDS: Photomasks, Optical proximity correction, Deep ultraviolet, Lithography, Resolution enhancement technologies, Semiconducting wafers, Binary data, Mask making, Process modeling, Optical lithography

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Proceedings Article | 27 December 1996 Paper

On-product metrology results from MEBES 4-TFE System

Christopher Braun, Frederick Peiffer

Proceedings Volume 2884, (1996) https://doi.org/10.1117/12.262832

KEYWORDS: Metrology, Reticles, Lithography, Photomasks, Manufacturing, Standards development, Optical lithography, Time metrology, Image registration, Glasses

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