Mr. Hideaki Sanuki Profile

Hideaki Sanuki

at Zeon Corp

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 9 April 2024 Presentation + Paper

Main chain scission resists towards high-NA EUV lithography

Akihide Shirotori, Yuji Oda, Rui Zhang, Kazunori Taguchi, Nobuhiro Sato, Sin Fu Yeh , Hyo Seon Suh, Danilo De Simone, Geert Vandenberghe, Hideaki Sanuki

Proceedings Volume 12957, 129570P (2024) https://doi.org/10.1117/12.3009737

KEYWORDS: Extreme ultraviolet lithography, Lithography, Polymers, Extreme ultraviolet, Film thickness, Etching, Electron beam lithography, Optical lithography, Photoresist materials, Critical dimension metrology

Read Abstract +

Proceedings Article | 21 November 2023 Poster + Paper

Update on main chain scission resists in Zeon for high-NA EUV lithography

Akihide Shirotori, Yuji Oda, Kazunori Taguchi, Sin Fu Yeh, Hyo Seon Suh, Danilo De Simone, Geert Vandenberghe, Hideaki Sanuki

Proceedings Volume 12750, 127500U (2023) https://doi.org/10.1117/12.2686602

KEYWORDS: Extreme ultraviolet lithography, Electron beam lithography, Polymers, Lithography, Stochastic processes, Scanners, Printing, High volume manufacturing, Extreme ultraviolet, Polymer thin films

Read Abstract +

Proceedings Article | 1 May 2023 Presentation + Paper

Development on main chain scission resists for high-NA EUV lithography

Akihide Shirotori, Manabu Hoshino, Makoto Fujimura, Sin Fu Yeh , Hyo Seon Suh, Danilo De Simone, Geert Vandenberghe, Hideaki Sanuki

Proceedings Volume 12498, 1249807 (2023) https://doi.org/10.1117/12.2657506

KEYWORDS: Extreme ultraviolet lithography, Polymers, Lithography, Extreme ultraviolet, Scanners, Photoresist materials, Compact discs, Coating, Etching, Electron beam lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years