Jiyeon Kim
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Poster
Proceedings Volume 12955, 129552U (2024) https://doi.org/10.1117/12.3010488
KEYWORDS: Semiconducting wafers, High volume manufacturing, Metrology, Copper, Chemical mechanical planarization, Surface finishing, Semiconductor manufacturing, Process control, Miniaturization, Atomic force microscopy

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