A fully error corrected quantum machine is one of the keys to unlocking the promise and potential of quantum computing. It is now widely accepted that this will require thousands if not millions of identical, highly coherent, interconnected qubits and highlights the increasing need for improving fabrication and scalability of current qubit implementations. Conventional qubit fabrication processes, many relying on lift-off, suffer from low yield and poor uniformity. We outline progress on realizing qubits in a 300 mm fabrication facility with state-of-the-art tooling and advanced process technology and demonstrate advantages of foundry compatible flows for both spin and superconducting qubits.
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