Prof. Koichi Awazu Profile

Prof. Koichi Awazu

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Publications (10)

SPIE Journal Paper | 1 July 2009

Demonstration of fabricating a needle array by the combination of x-ray grayscale mask with the lithografie, galvanoformung, abformung process

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

JM3, Vol. 8, Issue 03, 033010, (July 2009) https://doi.org/10.1117/12.10.1117/1.3158617

KEYWORDS: X-rays, Photomasks, Polymethylmethacrylate, X-ray lithography, Silicon, Scanning electron microscopy, X-ray technology, Nickel, X-ray imaging, Self-assembled monolayers

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Proceedings Article | 9 January 2008 Paper

A novel fabrication method of needle array combined x-ray gray mask with LIGA process

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

Proceedings Volume 6800, 68001R (2008) https://doi.org/10.1117/12.753858

KEYWORDS: X-rays, Photomasks, Polymethylmethacrylate, X-ray lithography, Silicon, X-ray technology, Nickel, Scanning electron microscopy, Photoresist processing, Etching

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SPIE Journal Paper | 1 January 2008

Fabrication and evaluation of a grayscale mask for x-ray lithography using MEMS technology

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

JM3, Vol. 7, Issue 01, 013009, (January 2008) https://doi.org/10.1117/12.10.1117/1.2894817

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Proceedings Article | 21 March 2007 Paper

Three-dimensional X-ray lithography using a silicon mask with inclined absorbers

Harutaka Mekaru, Takayuki Takano, Koichi Awazu, Masaharu Takahashi, Ryutaro Maeda

Proceedings Volume 6517, 651735 (2007) https://doi.org/10.1117/12.711824

KEYWORDS: X-rays, X-ray lithography, Photomasks, Silicon, Polymethylmethacrylate, Scanning electron microscopy, X-ray technology, Etching, Microelectromechanical systems, X-ray imaging

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Proceedings Article | 27 August 2005 Paper

Two and three-dimensional photonic crystals of titanium dioxide and optical properties

Koichi Awazu, Xiaomin Wang, Makoto Fujimaki, Hiroaki Imai, Taketo Kuriyama, Yoshimichi Ohki

Proceedings Volume 5931, 593106 (2005) https://doi.org/10.1117/12.617647

KEYWORDS: Polymethylmethacrylate, Refractive index, Photonic crystals, X-ray lithography, Silicon, Photomasks, X-rays, Annealing, Optical properties, Titanium dioxide

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Proceedings Article | 12 April 2001 Paper

Ablation of amorphous SiO2 using ArF excimer laser

Koichi Awazu

Proceedings Volume 4347, (2001) https://doi.org/10.1117/12.425011

KEYWORDS: Excimer lasers, Laser ablation, Silicon, Silica, Glasses, Chemical species, Raman spectroscopy, Pulsed laser operation, Vacuum ultraviolet, Oxygen

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Proceedings Article | 2 October 1997 Paper

Modification and densification of sol-gel-derived silica films at low temperatures

Hiroaki Imai, Hiroshi Hirashima, Koichi Awazu, Hideo Onuki

Proceedings Volume 3136, (1997) https://doi.org/10.1117/12.279157

KEYWORDS: Silica, Sol-gels, Photons, Water, Vacuum ultraviolet, Ions, Ion implantation, Glasses, Refractive index, Lithium

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Proceedings Article | 16 August 1996 Paper

Progress report on recent research with polarizing undulator

Hideo Onuki, Kazutoshi Yagi, Koichi Awazu, Toru Yamada, Terubumi Saito, M. Yuri, Yutaka Inoue, S. Ishizaka

Proceedings Volume 2873, (1996) https://doi.org/10.1117/12.246189

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Proceedings Article | 13 October 1994 Paper

Structural change in sol-gel-derived SiO2 films using ultraviolet irradiation

Hiroaki Imai, Hiroshi Hirashima, Koichi Awazu, Hideo Onuki

Proceedings Volume 2288, (1994) https://doi.org/10.1117/12.189015

KEYWORDS: Sol-gels, Photons, Refractive index, Ultraviolet radiation, Silicon films, Silicon, Ellipsometry, Silica, Absorption, Synchrotron radiation

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Proceedings Article | 22 December 1993 Paper

Chemical reactions of Ge-related species in SiO2: GeO2 optical fibers

Koichi Awazu, Hideo Hosono, Hiroshi Kawazoe

Proceedings Volume 2044, (1993) https://doi.org/10.1117/12.165677

KEYWORDS: Absorption, Glasses, Ultraviolet radiation, Optical fibers, Germanium, Second-harmonic generation, Silica, Molecules, Silicon, Chemical reactions

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Showing 5 of 10 publications

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