Dr. Moosong Lee Profile

Dr. Moosong Lee

Staff engineer at SAMSUNG Electronics Co Ltd

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Publications (1)

Proceedings Article | 26 May 2022 Presentation + Paper

Absolute overlay measurement based on voltage contrast defect inspection with programmed misalignments for DRAM devices

Moosong Lee, Jinsun Kim, Dohyeon Park, Yeeun Han, Junseong Yoon, Seung Yoon Lee, Chan Hwang, Achim Woessner, Cyrus Tabery, Miao Wang, Antonio Corradi, Young-Hoon Song, Yun-A Sung, Thomas Kim, Aileen Soco, Jason Kim, Chih-Hung Hsieh

Proceedings Volume 12053, 1205315 (2022) https://doi.org/10.1117/12.2626721

KEYWORDS: Overlay metrology, Semiconducting wafers, Defect inspection, Metrology, Inspection, Standards development, Image processing, Electronics, Etching, Electrons

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