Dr. Mototaka Arakawa Profile

Dr. Mototaka Arakawa

Research Associate at Tohoku Univ

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Author

Publications (7)

Proceedings Article | 1 April 2013 Paper

Homogeneity improvement of TiO2-SiO2 glass synthesized by the soot method and its evaluation using the ultrasonic measurement system

Masahiro Kawagishi, Junko Konishi, Masaaki Takata, Mototaka Arakawa, Yuji Ohashi, Jun-ichi Kushibiki

Proceedings Volume 8679, 86791N (2013) https://doi.org/10.1117/12.2011655

KEYWORDS: Glasses, Polishing, Surface finishing, Ultrasonics, Extreme ultraviolet lithography, Birefringence, Line scan image sensors, Optical components, Polarization, Titanium dioxide

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Proceedings Article | 23 March 2010 Paper

Development of an ultrasonic system for super-precise measurement of zero-CTE temperature of EUVL-grade TiO2-SiO2 ultra-low-expansion glasses

Jun-ichi Kushibiki, Mototaka Arakawa, Yuji Ohashi, Toshio Sannomiya, Yuko Maruyama

Proceedings Volume 7636, 76362M (2010) https://doi.org/10.1117/12.846570

KEYWORDS: Glasses, Ultrasonics, Extreme ultraviolet lithography, Temperature metrology, Velocity measurements, Acoustics, Annealing, Photomasks, Mirrors, Material characterization

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Proceedings Article | 18 March 2009 Paper

Precise evaluation of zero-CTE temperature of EUVL-grade TiO2-SiO2 ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system

Jun-ichi Kushibiki, Mototaka Arakawa

Proceedings Volume 7271, 72713D (2009) https://doi.org/10.1117/12.814179

KEYWORDS: Glasses, Ultrasonics, Velocity measurements, Calibration, Material characterization, Silica, Temperature metrology, Extreme ultraviolet lithography, Acoustics, Titanium dioxide

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Proceedings Article | 21 March 2008 Paper

Evaluation of TiO2-SiO2 ultra-low-expansion glass fabricated by the soot method using the line-focus-beam ultrasonic material characterization system

Jun-ichi Kushibiki, Mototaka Arakawa, Tetsuji Ueda, Akira Fujinoki

Proceedings Volume 6921, 69213P (2008) https://doi.org/10.1117/12.772259

KEYWORDS: Glasses, Ultrasonics, Velocity measurements, Material characterization, Direct methods, Silica, Acoustics, Extreme ultraviolet lithography, Temperature metrology, Titanium dioxide

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Proceedings Article | 15 March 2007 Paper

Evaluation and selection of EUVL-grade TiO2-SiO2 ultra-low-expansion glasses using the line-focus-beam ultrasonic material characterization system

Mototaka Arakawa, Yuji Ohashi, Jun-ichi Kushibiki

Proceedings Volume 6517, 651725 (2007) https://doi.org/10.1117/12.712203

KEYWORDS: Glasses, Ultrasonics, Velocity measurements, Extreme ultraviolet lithography, Material characterization, Control systems, Photomasks, Reflectivity, EUV optics, Calibration

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Proceedings Article | 23 March 2006 Paper

Striae evaluation of TiO₂-SiO₂ ultra-low expansion glasses using the line-focus-beam ultrasonic material characterization system

Mototaka Arakawa, Jun-ichi Kushibiki, Yuji Ohashi

Proceedings Volume 6151, 615123 (2006) https://doi.org/10.1117/12.656396

KEYWORDS: Glasses, Ultrasonics, Velocity measurements, Calibration, Acoustics, Wave propagation, Signal attenuation, Material characterization, Extreme ultraviolet lithography, Chemical analysis

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Proceedings Article | 10 May 2005 Paper

A super-precision evaluation method of ultra-low expansion glasses using the line-focus-beam ultrasonic material characterization system

Jun-ichi Kushibiki, Mototaka Arakawa, Yuji Ohashi, Kouji Suzuki, Takahisa Maruyama

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599160

KEYWORDS: Glasses, Ultrasonics, Velocity measurements, Chemical analysis, Material characterization, Extreme ultraviolet lithography, Nondestructive evaluation, Acoustics, Wave propagation, Silica

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Showing 5 of 7 publications

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