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Nathan Neal
at GLOBALFOUNDRIES Inc
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Author
Publications (2)
Proceedings Article | 20 November 2024 Poster + Paper
Application of KrF PSM in ArF photolithography processing
Proceedings Volume 13216, 132162J (2024) https://doi.org/10.1117/12.3034703
KEYWORDS: Photomasks, Semiconducting wafers, Optical proximity correction, Simulations, Optical lithography, Phase shifts
Proceedings Article | 22 January 2018 Presentation + Paper
Reduction and control of intrafield focus variation on 7nm technology
Jennifer Shumway, Nathan Neal, Sheldon Meyers, Jens Reichelt, Young Ki Kim, Justin Hanson, Ferhad Kamalizadeh, Dionysios Petromanolakis, Youri van Dommelen, Robert Bonanni, Arjan Gijsbertsen
Proceedings Volume 10147, 101470B (2018) https://doi.org/10.1117/12.2258391
KEYWORDS: Optical lithography, Current controlled current source, Calibration, Scanners, Reticles, Monochromatic aberrations, Software development, Semiconducting wafers
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