Dr. Ryo Shibata Profile

Dr. Ryo Shibata

at Nikon Corp

SPIE Involvement:

Author

Publications (29)

Proceedings Article | 23 March 2012 Paper

Paper

Development of EUV lithography tool technologies at Nikon

Katsuhiko Murakami, Tetsuya Oshino, Hiroyuki Kondo, Hiroshi Chiba, Yoshio Kawabe, Takuro Ono, Noriaki Kandaka, Atsushi Yamazaki, Takashi Yamaguchi, Ryo Shibata, Masayuki Shiraishi

Proceedings Volume 8322, 832215 (2012) https://doi.org/10.1117/12.917676

KEYWORDS: Extreme ultraviolet lithography, Mirrors, Contamination, Extreme ultraviolet, Multilayers, Reflectivity, Carbon, Silicon, Apodization, Oxidation

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Proceedings Article | 3 October 2007 Paper

Paper

Thin-foil multilayer-supermirror hard x-ray telescopes for InFOCuS/SUMIT balloon experiments and NeXT satellite program

Yasushi Ogasaka, Keisuke Tamura, Takuya Miyazawa, Yoshihiro Fukaya, Tomonaga Iwahara, Naoki Sasaki, Akihiro Furuzawa, Yoshito Haba, Yasufumi Kanou, Daisuki Ueno, Hideyo Kunieda, Koujun Yamashita, Ryo Shibata, Takashi Okajima, Jack Tueller, Peter Serlemitsos, Yang Soong, Kai-Wing Chan, Emi Miyata, Hiroshi Tsunemi, Kentaro Uesugi, Yoshio Suzuki, Yoshiharu Namba

Proceedings Volume 6688, 668803 (2007) https://doi.org/10.1117/12.733694

KEYWORDS: Reflectors, X-ray telescopes, Hard x-rays, Image quality, Telescopes, Satellites, Error analysis, Space telescopes, Mirrors, X-rays

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Proceedings Article | 15 June 2006 Paper

Paper

Development of the scintillator-deposited charge-coupled device and application for the balloon-borne experiment: SUMIT

E. Miyata, K. Mukai, K. Ikegami, N. Tawa, N. Anabuki, H. Tsunemi, Y. Ogasaka, K. Tamura, A. Furuzawa, R. Shibata, Y. Haba, H. Kunieda, Y. Saito, T. Yamagami, K. Miyaguchi

Proceedings Volume 6266, 62662S (2006) https://doi.org/10.1117/12.671018

KEYWORDS: Charge-coupled devices, X-rays, Photons, Scintillators, Hard x-rays, Bismuth, Signal processing, Sensors, Visible radiation, X-ray telescopes

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Proceedings Article | 15 June 2006 Paper

Paper

Design and technology review of the x-ray telescope system onboard NeXT mission

Yasushi Ogasaka, Keisuke Tamura, Ryo Shibata, Takashi Okajima, Akihiro Furuzawa, Hideyo Kunieda, Yoshitomo Maeda, Manabu Ishida, Hisamitsu Awaki

Proceedings Volume 6266, 626615 (2006) https://doi.org/10.1117/12.671341

KEYWORDS: X-ray telescopes, Reflectors, Telescopes, Hard x-rays, Image quality, Reflectivity, X-rays, Space telescopes, Mirrors, Reflector telescopes

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Proceedings Article | 15 June 2006 Paper

Paper

Performance characterization of hard x-ray imaging instruments at synchrotron radiation facility SPring-8

Yasushi Ogasaka, Keisuke Tamura, Ryo Shibata, Akihiro Furuzawa, Tomokazu Nakamura, Masataka Naitou, Takuya Miyazawa, Kenta Shimoda, Katsuhiko Onishi, Yoshihiro Fukaya, Tomonaga Iwahara, Yasushi Kanou, Hideyo Kunieda, Koujun Yamashita, Emi Miyata, Kenji Mukai, Kazuhiro Ikegami, Michihiko Aono, Hiroshi Tsunemi, Kentaro Uesugi, Yoshio Suzuki

Proceedings Volume 6266, 62663T (2006) https://doi.org/10.1117/12.671232

KEYWORDS: Hard x-rays, X-ray telescopes, X-rays, Calibration, Charge-coupled devices, Space telescopes, Synchrotron radiation, Synchrotrons, Imaging systems, Scintillation

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Proceedings Article | 15 June 2006 Paper

Paper

Development and performance of the advanced hard x-ray telescope for the balloon experiment

Takuya Miyazawa, Ryo Shibata, Yasushi Ogasaka, Yoshihiro Fukaya, Masataka Naitou, Tomonaga Iwahara, Kenta Shimoda, Keisuke Tamura, Akihiro Furuzawa, Hideyo Kunieda, Koujun Yamashita, Shin Yokoi, Takuma Yoshii, Naoya Watanabe, Yoshiharu Namba

Proceedings Volume 6266, 62663C (2006) https://doi.org/10.1117/12.671346

KEYWORDS: Reflectors, Hard x-rays, Telescopes, X-ray telescopes, Reflector telescopes, Image quality, Space telescopes, X-rays, Reflectivity, Reflection

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Proceedings Article | 15 June 2006 Paper

Paper

Development of position sensitive scintillation counter for balloon-borne hard x-ray telescope

Keisuke Tamura, Hideyo Kunieda, Yasushi Ogasaka, Akihiro Furuzawa, Ryo Shibata, Tomokazu Nakamura, Katsuhiko Ohnishi, Yasufumi Kanou, Emi Miyata, Hiroshi Tsunemi

Proceedings Volume 6266, 62663R (2006) https://doi.org/10.1117/12.671543

KEYWORDS: Sensors, Hard x-rays, X-ray telescopes, Scintillation, Space telescopes, Scintillators, X-rays, Telescopes, Synchrotron radiation, Photomultipliers

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Proceedings Article | 13 June 2006 Paper

Paper

The demonstration model of four-stage x-ray telescope for DIOS mission

Y. Tawara, I. Sakurai, A. Furuzawa, Y. Ogasaka, K. Tamura, R. Shibata, T. Miyazawa, Y. Fukaya, T. Masuda, T. Torii, M. Sakashita

Proceedings Volume 6266, 62661E (2006) https://doi.org/10.1117/12.670771

KEYWORDS: Mirrors, X-ray telescopes, Optical alignment, Platinum, Nickel, Reflectivity, X-rays, Alignment procedures, Aluminum, Gold

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Proceedings Article | 15 October 2005 Paper

Paper

Design and fabrication of multifoil hard x-ray telescope for space observations

Yasushi Ogasaka, Koujun Yamashita, Ryo Shibata, Keisuke Tamura

Proceedings Volume 5962, 59621T (2005) https://doi.org/10.1117/12.625116

KEYWORDS: X-ray telescopes, Space telescopes, Hard x-rays, X-rays, Reflectivity, Reflectors, Reflection, Telescopes, Image quality, Observatories

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Proceedings Article | 8 September 2005 Paper

Paper

Development of a four-stage x-ray telescope for DIOS mission

Yuzuru Tawara, Machiko Sakashita, Akihiro Furuzawa, Yasushi Ogasaka, Ryo Shibata, Keisuke Tamura, Takuya Miyazawa, Rika Takahashi, Kenta Shimoda, Chiaki Sakai

Proceedings Volume 5900, 59000J (2005) https://doi.org/10.1117/12.615844

KEYWORDS: Mirrors, X-ray telescopes, X-rays, Optical instrument design, Satellites, Spatial resolution, Oxygen, Aluminum, Epoxies, Nickel

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Proceedings Article | 8 September 2005 Paper

Paper

Characterization of a hard-x-ray telescope at a synchrotron facility

Y. Ogasaka, R. Shibata, K. Tamura, A. Furuzawa, R. Takahashi, T. Miyazawa, M. Sakashita, C. Sakai, K. Shimoda, N. Yamada, Y. Fukaya, H. Kunieda, K. Yamashita, E. Miyata, K. Uesugi, Y. Suzuki

Proceedings Volume 5900, 59000F (2005) https://doi.org/10.1117/12.616546

KEYWORDS: X-ray telescopes, Hard x-rays, Telescopes, X-rays, Space telescopes, Synchrotrons, X-ray optics, Point spread functions, Imaging systems, Sensors

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Proceedings Article | 1 September 2005 Paper

Paper

Development of x-ray mirrors for x-ray telescopes

Keisuke Tamura, Chiaki Sakai, Nubuaki Yamada, Yasushi Ogasaka, Ryo Shibata

Proceedings Volume 5900, 590005 (2005) https://doi.org/10.1117/12.616595

KEYWORDS: Reflectivity, Mirrors, X-rays, X-ray telescopes, Platinum, Composites, Nickel, Sputter deposition, Absorption, Ion beams

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Proceedings Article | 1 September 2005 Paper

Paper

Development of hard x-ray telescope for the InFOCμS balloon experiment

Ryo Shibata, Yasushi Ogasaka, Keisuke Tamura, Akihiro Furuzawa, Yuzuru Tawara, Hideyo Kunieda, Koujun Yamashita, Rika Takahashi, Machiko Sakashita, Takuya Miyazawa, Kenta Shimoda, Yoshihiro Fukaya, Chiaki Sakai, Nobuaki Yamada, Masataka Naitou, Tomonaga Iwaraha, Kenjiro Sakaki, Hiroaki Mutoh, Jack Tueller

Proceedings Volume 5900, 59000Q (2005) https://doi.org/10.1117/12.616792

KEYWORDS: Reflectors, X-ray telescopes, Hard x-rays, Telescopes, X-rays, Image quality, Space telescopes, Reflectivity, Reflector telescopes, X-ray optics

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Proceedings Article | 1 September 2005 Paper

Paper

First light of a hard-x-ray imaging experiment: the InFOCμS balloon flight

Yasushi Ogasaka, Jack Tueller, Koujun Yamashita, Peter Serlemitsos, Ryo Shibata, Keisuke Tamura, Akihiro Furuzawa, Takuya Miyazawa, Rika Takahashi, Machiko Sakashita, Kenta Shimoda, Yuzuru Tawara, Hideyo Kunieda, Takashi Okajima, Hans Krimm, Scott Barthelmy, Yang Soong, Kai-Wing Chan, Scott Owens, Marie Rex, Ed Chapin, Mark Devlin

Proceedings Volume 5900, 59000R (2005) https://doi.org/10.1117/12.616677

KEYWORDS: Hard x-rays, Sensors, Telescopes, Signal detection, X-ray telescopes, Imaging systems, X-rays, Astronomy, Stars, Observatories

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Proceedings Article | 11 October 2004 Paper

Paper

Ground-based x-ray calibration of the Astro-E2 x-ray telescope: I. With pencil beam

Akiharu Itoh, Yoshito Haba, Akira Hayakawa, Ryo Iizuka, Chiaki Inoue, Hirohiko Inoue, Manabu Ishida, Kei Itoh, Hideyo Kunieda, Yoshitomo Maeda, Kazutami Misaki, Hideyuki Mori, Masataka Naitou, Shunsaku Okada, Ryo Shibata, Tomoo Shimizu, Yushi Yokoyama

Proceedings Volume 5488, (2004) https://doi.org/10.1117/12.551700

KEYWORDS: X-rays, X-ray telescopes, Telescopes, Space telescopes, X-ray optics, Calibration, Vignetting, X-ray imaging, Reflectors, Satellites

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Proceedings Article | 11 October 2004 Paper

Paper

Ground-based x-ray calibration of the Astro-E2 x-ray telescope: II. With diverging beam at PANTER

Kei Itoh, Hideyo Kunieda, Yoshitomo Maeda, Kazutami Misaki, Peter Serlemitsos, Ryo Shibata, Bernd Budau, Wolfgang Burkert, Michael Freyberg, Gisela Hartner, Kai-Wing Chan, Yoshito Haba, Akira Hayakawa, Ryo Iizuka, Chiaki Inoue, Hirohiko Inoue, Manabu Ishida, Akiharu Itoh, John Lehan, Hideyuki Mori, Masataka Naitou, Shunsaku Okada, Takashi Okajima, Tomoo Shimizu, Yang Soong, Yushi Yokoyama

Proceedings Volume 5488, (2004) https://doi.org/10.1117/12.551446

KEYWORDS: X-rays, X-ray telescopes, Calibration, Reflectors, Sensors, Telescopes, Stray light, Point spread functions, Space telescopes, X-ray imaging

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Proceedings Article | 11 October 2004 Paper

Paper

Upgraded hard x-ray telescope with multilayer supermirror for the InFOCµS balloon experiment

Ryo Shibata, Yasushi Ogasaka, Keisuke Tamura, Akihiro Furuzawa, Yuzuru Tawara, Koujun Yamashita, Rika Takahashi, Machiko Sakashita, Takuya Miyazawa, Kenta Shimoda, Chiaki Sakai, Nobuaki Yamada, Masataka Naitou, Taku Futamura, Peter Serlemitsos, Yang Soong, Kai-Wing Chan, Takashi Okajima, Jack Tueller, Hans Krimm, Scott Barthelmy, Scott Owens, Hideyo Kunieda, Yoshiharu Namba

Proceedings Volume 5488, (2004) https://doi.org/10.1117/12.551462

KEYWORDS: X-ray telescopes, Hard x-rays, Reflectors, Telescopes, X-rays, Reflectivity, Space telescopes, Reflector telescopes, Image quality, Mirrors

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Proceedings Article | 11 October 2004 Paper

Paper

NeXT hard x-ray telescope

Yasushi Ogasaka, Keisuke Tamura, Ryo Shibata, Akihiro Furuzawa, Takashi Okajima, Koujun Yamashita, Yuzuru Tawara, Hideyo Kunieda

Proceedings Volume 5488, (2004) https://doi.org/10.1117/12.552364

KEYWORDS: Hard x-rays, X-ray telescopes, Space telescopes, Reflectivity, X-rays, X-ray optics, Telescopes, Optical instrument design, Reflection, Astronomy

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Proceedings Article | 29 January 2004 Paper

Paper

Ground-based X-ray calibration of the telescopes onboard Astro-E2 satellite

Kazutami Misaki, Hideyo Kunieda, Yoshitomo Maeda, Yoshito Haba, Kei Itoh, Hideyuki Mori, Ryo Iizuka, Akiharu Itoh, Hirohiko Inoue, Shunsaku Okada, Yuushi Yokoyama, Yasushi Ogasaka, Keisuke Tamura, Akihiro Furuzawa, Ryo Shibata, Takeshi Tanaka, Masataka Naitou, Manabu Ishida, Akira Hayakawa, Chiaki Inoue, Atsushi Hayashi, Tomohiro Shimizu, Peter Serlemitsos, Yang Soong, Kai-Wing Chan, Takashi Okajima, John Lehan

Proceedings Volume 5168, (2004) https://doi.org/10.1117/12.505773

KEYWORDS: X-rays, X-ray telescopes, Image quality, Calibration, Space telescopes, Telescopes, Point spread functions, X-ray imaging, X-ray detectors, Sensors

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Proceedings Article | 29 January 2004 Paper

Paper

Development of Astro-E2 XRT pre-collimator for stray-light protection

Hideyuki Mori, Ryo Iizuka, Hideyo Kunieda, Kazutami Misaki, Yoshito Haba, Kei Itoh, Akiharu Itoh, Akira Hayakawa, Chiaki Inoue, Manabu Ishida, Ryo Shibata

Proceedings Volume 5168, (2004) https://doi.org/10.1117/12.506511

KEYWORDS: X-rays, Stray light, Fermium, Frequency modulation, Reflectors, Aluminum, X-ray telescopes, Sensors, Phase modulation, Optical alignment

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Proceedings Article | 29 January 2004 Paper

Paper

Development of the hard x-ray telescope for balloon-borne experiment

Keisuke Tamura, Yasushi Ogasaka, Ryo Shibata, Akihiro Furuzawa, Taku Futamura, Rika Takahashi, Yuzuru Tawara, Kojun Yamashita, Hideyo Kunieda, Jack Tuller, Peter Serlemitsos, Takashi Okajima

Proceedings Volume 5168, (2004) https://doi.org/10.1117/12.505655

KEYWORDS: X-ray telescopes, Telescopes, Hard x-rays, Space telescopes, X-rays, Mirrors, Synchrotron radiation, Spatial resolution, X-ray imaging, X-ray optics

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Proceedings Article | 11 March 2003 Paper

Paper

Error budgets for the image degradation of x-ray telescope onboard Astro-E2

Kazutami Misaki, Ryo Shibata, Yasuhiro Hidaka, Hideyo Kunieda, Manabu Ishida, Hirohiko Honda, Yoshitomo Maeda, Takao Endo, Kohsuke Imamura, Yoshito Haba, Kei Itoh, Hideyuki Mori, Ryo Iizuka, Akira Hayakawa, Taijiro Morihisa

Proceedings Volume 4851, (2003) https://doi.org/10.1117/12.461355

KEYWORDS: Point spread functions, X-rays, Image quality, CCD image sensors, Sensors, Calibration, Surface roughness, X-ray telescopes, Mirrors, X-ray astronomy

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Proceedings Article | 11 March 2003 Paper

Paper

Development of supermirror hard x-ray telescope and the results of the first InFOCuS flight observation

Yasushi Ogasaka, Keisuke Tamura, Takashi Okajima, Yuzuru Tawara, Koujun Yamashita, Akihiro Furuzawa, Kazutoshi Haga, Satoshi Ichimaru, Seiji Takahashi, Shinichi Fukuda, Hideo Kito, Arifumi Goto, Seima Kato, Hiroyuki Satake, Ken'ichi Nomoto, Noriyuki Hamada, Peter Serlemitsos, Jack Tueller, Yang Soong, Kai-Wing Chan, Scott Owens, Fred Berendse, Hans Krimm, Wayne Baumgartner, Scott Barthelmy, Hideyo Kunieda, Kazutami Misaki, Ryo Shibata, Hideyuki Mori, Kei Itoh, Yoshiharu Namba

Proceedings Volume 4851, (2003) https://doi.org/10.1117/12.461531

KEYWORDS: X-ray telescopes, Hard x-rays, Reflectors, Reflectivity, X-rays, Sensors, Space telescopes, Telescopes, Reflection, Mirrors

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Proceedings Article | 11 March 2003 Paper

Paper

Normal incidence multilayer telescope for soft x-ray beam expander

Hideyo Kunieda, Kazutami Misaki, Yoshito Haba, Manabu Ishida, Kei Itoh, Hideyuki Mori, Ryo Shibata

Proceedings Volume 4851, (2003) https://doi.org/10.1117/12.461513

KEYWORDS: X-ray telescopes, X-rays, Scattering, Mirrors, Laser scattering, Reflectivity, Calibration, Space telescopes, Beam expanders, Point spread functions

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Proceedings Article | 11 March 2003 Paper

Paper

ASTRO-E2 precollimator for stray light protection: II. Fabrication and x-ray calibration

Hideyuki Mori, Ryo Shibata, Yoshitomo Maeda, Kazutami Misaki, Yoshito Haba, Kei Itoh, Ryo Iizuka, Taijiro Morihisa, Hideyo Kunieda, Akira Hayakawa, Manabu Ishida

Proceedings Volume 4851, (2003) https://doi.org/10.1117/12.461319

KEYWORDS: X-rays, Stray light, Aluminum, X-ray telescopes, Sensors, Space telescopes, Charge-coupled devices, Calibration, Dysprosium, X-ray optics

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Proceedings Article | 11 March 2003 Paper

Paper

ASTRO-E2 XRT precollimator for stray light protection: I. Design and expected performance

Ryo Shibata, Hideyuki Mori, Yoshitomo Maeda, Kazutami Misaki, Yoshito Haba, Kei Itoh, Ryo Iizuka, Taijiro Morihisa, Hideyo Kunieda, Akira Hayakawa, Manabu Ishida

Proceedings Volume 4851, (2003) https://doi.org/10.1117/12.461475

KEYWORDS: Stray light, Reflectors, Reflection, X-rays, X-ray telescopes, Sensors, Photons, Space telescopes, Satellites, Aluminum

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Proceedings Article | 11 March 2003 Paper

Paper

An x-ray calibration facility with a dynamical pencil beam for the post-Astro-E2 telescopes

Yoshitomo Maeda, Akiharu Itoh, Kei Itoh, Hideyo Kunieda, Yoshito Haba, Akira Hayakawa, Ryo Iizuka, Chiaki Inoue, Manabu Ishida, Kazutami Misaki, Hideyuki Mori, Ryo Shibata

Proceedings Volume 4851, (2003) https://doi.org/10.1117/12.461338

KEYWORDS: X-rays, X-ray telescopes, Sensors, Collimators, Space telescopes, Telescopes, Mirrors, Calibration, X-ray detectors, Charge-coupled devices

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Proceedings Article | 11 March 2003 Paper

Paper

X-ray characterization of Capillary System

Yoshito Haba, Ryo Iizuka, Akira Hayakawa, Kazutami Misaki, Ryo Shibata, Kei Itoh, Hideyuki Mori, Yoshitomo Maeda, Manabu Ishida, Hideyo Kunieda

Proceedings Volume 4851, (2003) https://doi.org/10.1117/12.461325

KEYWORDS: X-rays, Capillaries, Sensors, X-ray optics, Electroluminescent displays, X-ray imaging, X-ray characterization, X-ray astronomy, X-ray detectors, Photons

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Proceedings Article | 19 November 1998 Paper

Paper

X-ray calibration of telescopes on board the ASTRO-E satellite

Ryo Shibata, Manabu Ishida, Hirohiko Honda, Takao Endo, Jun'ichi Ishida, Hideyo Kunieda, Yuzuru Tawara, Akihiro Furuzawa, Yasushi Ogasaka, Manabu Watanabe, K. Misakai, Tetsuo Yoshioka, Peter Serlemitsos, Yang Soong, Kai-Wing Chan, Yuichi Terashima, Satoshi Akao

Proceedings Volume 3444, (1998) https://doi.org/10.1117/12.331282

KEYWORDS: X-rays, Reflectors, Stray light, Charge-coupled devices, Sensors, X-ray telescopes, Aluminum, Reflection, Calibration, Satellites

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Showing 5 of 29 publications

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