Mr. Shingo Ishida Profile

Shingo Ishida

at Canon inc

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Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

NIL solutions using computational lithography for semiconductor device manufacturing

Sentaro Aihara, Kenji Yamamoto, Yukio Nakano, Hiromu Kijima, Satoru Jimbo, Humberto Evans, Shingo Ishida, Masayoshi Fujimoto, Shota Takami, Yuichiro Oguchi, Junichi Seki, Toshiya Asano, Osamu Morimoto

Proceedings Volume 12954, 129540Z (2024) https://doi.org/10.1117/12.3009839

KEYWORDS: Nanoimprint lithography, Artificial intelligence, Lithography, Metrology, Computer simulations

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Proceedings Article | 30 April 2023 Presentation

Refinements of a nanoimprint process simulator

Shingo Ishida, Junichi Seki, Yuichiro Oguchi, Naoki Kiyohara, Koshiro Suzuki, Kohei Nagane, Shintaro Narioka, Yoshihiro Shiode, Sentaro Aihara, Toshiya Asano

Proceedings Volume 12495, 124950N (2023) https://doi.org/10.1117/12.2657058

KEYWORDS: Nanoimprint lithography, Optical lithography, Ultraviolet radiation, Physics, Performance modeling, Nanotechnology, Manufacturing equipment, Manufacturing, Lithography, Device simulation

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