Dr. Tomasz Bieniek Profile

Dr. Tomasz Bieniek

at Institute of Microelectronics and Photonics

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Author

Publications (4)

Proceedings Article | 10 November 2016 Paper

Innovative multi-cantilever array sensor system with MOEMS read-out

F. Ivaldi, T. Bieniek, P. Janus, P. Grabiec, W. Majstrzyk, D. Kopiec, T. Gotszalk

Proceedings Volume 10161, 1016102 (2016) https://doi.org/10.1117/12.2244154

KEYWORDS: Sensors, Microopto electromechanical systems, Micromirrors, Calibration, Electronics, Head, Laser sources, System integration, Signal to noise ratio, Data acquisition

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Proceedings Article | 10 November 2016 Paper

Functionalization of MEMS cantilever beams for interconnect reliability investigation: development practice

T. Bieniek, G. Janczyk, R. Dobrowolski, K. Wojciechowska, A. Malinowska, A. Panas, M. Nieprzecki, H. Kłos

Proceedings Volume 10161, 1016103 (2016) https://doi.org/10.1117/12.2244299

KEYWORDS: Microelectromechanical systems, Reliability, Metals, Silicon, 3D modeling, Optimization (mathematics), Plasma etching, Semiconducting wafers, Lead, Device simulation

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Proceedings Article | 25 July 2013 Paper

Silicon nanowires reliability and robustness investigation using AFM-based techniques

Tomasz Bieniek, Grzegorz Janczyk, Paweł Janus, Piotr Grabiec, Marek Nieprzecki, Grzegorz Wielgoszewski, Magdalena Moczała, Teodor Gotszalk, Elizabeth Buitrago, Montserrat Badia, Adrian Ionescu

Proceedings Volume 8902, 89022L (2013) https://doi.org/10.1117/12.2031229

KEYWORDS: Atomic force microscopy, Silicon, Reliability, Scanning electron microscopy, Biosensing, Nanostructures, Nanolithography, Field effect transistors, Sensing systems, Nanowires

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Proceedings Article | 25 July 2013 Paper

Manufacturing, measurement and control of MEMS / NEMS electrostatically driven structures

Magdalena Ekwińska, Piotr Kunicki, Tomasz Piasecki, Paweł Janus, Krzysztof Domański, Tomasz Bieniek, Piotr Grabiec, Teodor Gotszalk

Proceedings Volume 8902, 89021X (2013) https://doi.org/10.1117/12.2031093

KEYWORDS: Manufacturing, Microelectromechanical systems, Capacitance, Optical testing, Control systems, Nanoelectromechanical systems, Electrodes, Polarization, Silica, Neodymium

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