Ms. Yanrong Wang Profile

Yanrong Wang

at North China Univ. of Technology

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Publications (2)

Proceedings Article | 3 October 2018 Paper

Optimization of absorber and multilayer in EUV mask for 1D and 2D patterns

Zhizhen Yang, Taian Fan, Lisong Dong, Yayi Wei, Yanrong Wang, Jing Zhang, Jiang Yan

Proceedings Volume 10809, 1080919 (2018) https://doi.org/10.1117/12.2501463

KEYWORDS: Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Lithography, Image resolution, Image quality, Light sources, Lithographic illumination, 3D modeling

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Proceedings Article | 3 October 2018 Paper

2D SRAF rule extraction for fast application based on model-based results

Yaoxuan Dai, Xiaojing Su, Pengzheng Gao, Yayi Wei, Yanrong Wang, Jing Zhang, Jiang Yan

Proceedings Volume 10810, 108101E (2018) https://doi.org/10.1117/12.2501455

KEYWORDS: SRAF, Model-based design, Microelectronics, Photomasks, Image classification, Extreme ultraviolet, Manufacturing, Roads, Extreme ultraviolet lithography

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