Ms. Young-Hwa Noh Profile

Young-Hwa Noh

at SAMSUG Electronics Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 9 September 2013 Paper

Mask automation: need a revolution in mask makers and equipment industry

Seong-yong Moon, Sang-yong Yu, Young-hwa Noh, Ki-jung Son, Hyun-Joo Lee, Han-Ku Cho

Proceedings Volume 8880, 888016 (2013) https://doi.org/10.1117/12.2025569

KEYWORDS: Photomasks, Manufacturing, Control systems, Process control, Semiconductors, Semiconducting wafers, Telecommunications, Wafer manufacturing, Mask making, Extreme ultraviolet

Read Abstract +

Proceedings Article | 20 October 2006 Paper

Required mask specification for mass production devices below 65-nm design node

Dongseok Nam, Soohan Choi, Jonggul Doh, Young-hwa Noh, Hojune Lee, Yu-jeung Sin, Bo-hye Kim, Man-kyu Kang, Byunggook Kim, Seong-woon Choi, Woosung Han

Proceedings Volume 6349, 634928 (2006) https://doi.org/10.1117/12.686534

KEYWORDS: Photomasks, Critical dimension metrology, Semiconducting wafers, Tolerancing, Photoresist processing, Optical proximity correction, Mask making, Semiconductors, Manufacturing, Computer simulations

Read Abstract +

Proceedings Article | 20 May 2006 Paper

Reduction of MDP time through the improvement of verification method

Young-Hwa Noh, Sung-Hoon Jang, Won-Tai Ki, Ji-Hyeon Choi, Seong-Woon Choi, Woo-Sung Han

Proceedings Volume 6283, 62832N (2006) https://doi.org/10.1117/12.681800

KEYWORDS: Data conversion, Computed tomography, Photomasks, Double patterning technology, Lithography, Resolution enhancement technologies, Semiconductors, Electronics, Data centers, Critical dimension metrology

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years