PROCEEDINGS VOLUME 3881
MICROELECTRONIC MANUFACTURING '99 | 22-23 SEPTEMBER 1999
Microelectronic Device Technology III
Editor(s): David Burnett, Toshiaki Tsuchiya
Editor Affiliations +
IN THIS VOLUME

6 Sessions, 35 Papers, 0 Presentations, 0 Posters
MICROELECTRONIC MANUFACTURING '99
22-23 September 1999
Santa Clara, CA, United States
Advanced Device Technology
Wen-Jie Qi, Byoung Hun Lee, Renee Nieh, LaeGu Kang, YongJoo Jeon, Katsu Onishi, Jack C. Lee
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360537
Junichi Murota, Masao Sakuraba, Takashi Matsuura
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360548
Bikas Maiti, Phil J. Tobin
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360560
Fazla Rabbi M.B. Hossain, Satheesh Ambadi, Richard Winer, Ken Kitt, Carlos Garcia, Jeff Pearse
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360567
Yasuhiro Sato, Toshiaki Tsuchiya
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360568
Kiyoshi Mori
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360569
Qing Tai Zhao, L. Kappius, S. Mesters, Siegfried Mantl
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360570
RF Devices and Technology
Don Hemmenway, Frank Baldwin, John D. Butler, Clay Crouch, Jose Delgado, Mike Jayne, Jeffrey M. Johnston, Rex Lowther, Michael Netzer, et al.
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360571
Martin C. Wilson, Peter H. Osborne, Simon Thomas, Trevor Cook
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360538
CMOS Integration, Devices, and Manufacturing
Hiroshi Kawashima, Motoshige Igarashi, Akihiko Harada, Hiroyuki Amishiro, Noboru Morimoto, Akihiko Ohsaki, Keiichi Higasitani, Hideaki Arima
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360540
Sidhartha Sen, Edward B. Harris, Richard W. Gregor, Samuel Martin, Mahjoub A. Abdelgadir, Rafael N. Barba, Sundar Chetlur, K. Steiner
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360541
Helene Thibieroz, Alain Duvallet
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360542
Gregory S. Scott, Samar K. Saha, Christopher S. Olsen, Faran Nouri, Jeffrey Lutze, Mark E. Rubin, Martin Manley
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360543
James F. Buller, Jon Cheek, Dirk Wristers, Daniel Kadoch, Michael Duane
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360544
Xiaomei Liu, Samiha Mourad
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360545
Eng-Hua Lim, Soh Yun Siah, Chong Wee Lim, Yong Meng Lee, Jia Zhen Zheng, Ravi Sundaresan, Kin Leong Pey
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360546
Mitsuru Chida, Katsuyuki Suga, Yasuyoshi Mishima, Nobuo Sasaki
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360547
Sub-0.1-um CMOS
G. Srinivasan, Samar K. Saha, G. A. Rezvani
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360549
Sejal N. Chheda, Navakanta Bhat, Paul Tsui, Suzanne Gonzales, Nigel Cave, Chong-Cheng Fu, Fred Huang, Amit Nangia, Philip Sung-Joon Choi, et al.
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360551
Qi Xiang, Bin Yu, Geffrey C. F. Yeap, Ming-Ren Lin
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360552
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360553
Gate Oxide and Isolation
Shiro Kamohara, Yutaka Okuyama, Yukiko Manabe, Kosuke Okuyama, Katsuhiko Kubota, Donggun Park, Chenming Hu
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360554
Christopher S. Olsen, Faran Nouri, Mark E. Rubin, Olivier Laparra, Gregory S. Scott
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360555
Ravi Sundaresan, Chock Hing Gan, Igor V. Peidous
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360556
Mo-Chium Yu, Syun-Ming Jang, C. H. Diaz, C. H. Yu, S. C. Sun, M. S. Liang
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360557
Valeriy Sukharev, Sheldon Aronowitz, Vladimir Zubkov, Helmut Puchner, John Haywood, James P. Kimball
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360558
Fabien Pierre, Said Aachboun, Olivier Bonnaud, H. Lhermite, Pierre Ranson, Christine Anceau, L. Cornibert
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360559
Poster Session
Valerii A. Kagadei, Yu V. Lilenko, Dmitrii I. Proskurovsky, L. S. Shirokova
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360561
Hubert Enichlmair, Oliver Stelmaszyk, Paul Williams
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360563
Andrej P. Kokhanenko, Aleksander G. Korotaev, Aleksander V. Voitsekhovskii, Ivan Grushin, Mikhail S. Opekunov, Gennady E. Remnev
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360564
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360565
Soh Yun Siah, Eng-Hua Lim, Ming-Jr Shiu, Kong Hean Lee, Jia Zhen Zheng
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360566
Advanced Device Technology
David J. Eaglesham
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360539
Farhad Moghadam
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360550
Ghavam G. Shahidi
Proceedings Volume Microelectronic Device Technology III, (1999) https://doi.org/10.1117/12.360562
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