Courtney A. Brewer
Process Development Engineer at Broadcom Inc
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 29 September 2009 Paper
Proceedings Volume 7451, 74510I (2009) https://doi.org/10.1117/12.826419
KEYWORDS: Microscopes, Zone plates, Extreme ultraviolet lithography, Objectives, Photomasks, Spatial resolution, X-ray lasers, Microscopy, Modulation, Modulation transfer functions

Proceedings Article | 18 March 2009 Paper
F. Brizuela, Y. Wang, C. Brewer, F. Pedaci, W. Chao, E. Anderson, Y. Liu, K. Goldberg, P. Naulleau, P. Wachulak, M. Marconi, D. Attwood, J. Rocca, C. Menoni
Proceedings Volume 7271, 72713F (2009) https://doi.org/10.1117/12.814320
KEYWORDS: Microscopes, Spatial resolution, Extreme ultraviolet lithography, Zone plates, Photomasks, Extreme ultraviolet, Image resolution, Inspection, Objectives, Modulation transfer functions

Proceedings Article | 12 October 2007 Paper
Courtney Brewer, Fernando Brizuela, Dale Martz, Georgiy Vaschenko, Mario Marconi, Weilun Chao, Erik Anderson, David Attwood, Alexander Vinogradov, Igor Artioukov, Yuriy Pershyn, Valeriy Kondratenko, Jorge Rocca, Carmen Menoni
Proceedings Volume 6702, 67020M (2007) https://doi.org/10.1117/12.733422
KEYWORDS: Microscopes, Zone plates, Spatial resolution, X-ray lasers, Microscopy, Image processing, Capillaries, Charge-coupled devices, Objectives, Silicon

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6151, 61512V (2006) https://doi.org/10.1117/12.657695
KEYWORDS: Extreme ultraviolet lithography, Lithography, Lithographic illumination, Extreme ultraviolet, Semiconducting wafers, EUV optics, Optical lithography, Light sources, Cadmium sulfide, Logic

Proceedings Article | 23 March 2006 Paper
Proceedings Volume 6151, 61510X (2006) https://doi.org/10.1117/12.656588
KEYWORDS: Extreme ultraviolet, Zone plates, Spatial resolution, Microscopes, Photomasks, Imaging systems, Extreme ultraviolet lithography, Inspection, Plasma, Reflectivity

Showing 5 of 7 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top