Mr. Kohei Noguchi Profile

Kohei Noguchi

at Tokyo Electron AT Ltd

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Publications (2)

Proceedings Article | 16 March 2007 Paper

Recent progress of a character projection-type low-energy electron-beam direct writing system

Kouhei Noguchi, Katsuhide Watanabe, Hidetoshi Kinoshita, Hiroyuki Shinozaki, Yasushi Kojima, Satoshi Morita, Fumihiko Nakamura, Norihiro Yamaguchi, Kazuhiko Kushitani, Tetsuro Nakasugi, Takeshi Koshiba, Takumi Oota

Proceedings Volume 6517, 65172I (2007) https://doi.org/10.1117/12.712118

KEYWORDS: Amplifiers, Semiconducting wafers, Data conversion, Distortion, Electron beam direct write lithography, Optical alignment, Control systems, Electrons, Data processing, Process control

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Proceedings Article | 24 March 2006 Paper

A character projection low energy electron beam direct writing system for device of small production lot with a variety of design

Fumihiko Nakamura, Katsuhide Watanabe, Hidetoshi Kinoshita, Hiroyuki Shinozaki, Yasushi Kojima, Satoshi Morita, Kouhei Noguchi, Norihiro Yamaguchi, Hisashi Isokawa, Kazuhiko Kushitani, Takayuki Satoh, Takeshi Koshiba, Takumi Oota, Tetsuro Nakasugi, Hiroyuki Mizuno

Proceedings Volume 6151, 61512A (2006) https://doi.org/10.1117/12.655963

KEYWORDS: Semiconducting wafers, Electron beam direct write lithography, Control systems, Electron beams, Vestigial sideband modulation, Data conversion, Beam shaping, Photomasks, Optical alignment, Amplifiers

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