Mr. Sagar Saxena Profile

Sagar Saxena

at Siemens EDA

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation

Shuling Wang, Shumay Shang, Sagar Saxena, Xima Zhang, George Lippincott, Le Hong, John Sturtevant

Proceedings Volume 12954, 1295415 (2024) https://doi.org/10.1117/12.3010925

KEYWORDS: Optical proximity correction, Lithography

Proceedings Article | 28 April 2023 Paper

Neal Lafferty, Sagar Saxena, Keisuke Mizuuchi, Yuansheng Ma, Xima Zhang, Pat LaCour, Alexander Tritchkov, Farah Kmiec, John Sturtevant

Proceedings Volume 12495, 124950K (2023) https://doi.org/10.1117/12.2647882

KEYWORDS: SRAF, Optical proximity correction, Machine learning, Lithography, Simulations

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Keywords/Phrases