Dr. Marcelo D. Ackermann
Full Professor at Univ. Twente
SPIE Involvement:
Author
Publications (38)

Proceedings Article | 4 October 2024 Presentation
Igor Makhotkin, Marcelo Ackermann, Dennis IJpes, Jacobus Sturm, Andrey Yakshin
Proceedings Volume PC13150, PC1315002 (2024) https://doi.org/10.1117/12.3029912
KEYWORDS: Reflectivity, Interfaces, X-rays, Polishing, Multilayers, Ions, Tungsten, Barrier layers, X-ray optics, X-ray microscopy

Proceedings Article | 4 October 2024 Presentation
Igor Makhotkin, Adele Valpreda, Dennis IJpes, Atul Tiwari, Joachim Woitok, Jacobus Sturm, Andrey Yakshin, Marcelo Ackermann, Niek Lokhorst
Proceedings Volume PC13150, PC1315004 (2024) https://doi.org/10.1117/12.3029909
KEYWORDS: X-rays, Interfaces, Multilayers, Reflectivity, X-ray fluorescence spectroscopy, Mirrors, Data modeling, X-ray lithography, Metrology, X-ray optics

Proceedings Article | 10 April 2024 Presentation + Paper
Atul Tiwari, Roberto Fallica, Marcelo Ackermann, Igor Makhotkin
Proceedings Volume 12955, 1295505 (2024) https://doi.org/10.1117/12.3010917
KEYWORDS: Photoacid generators, X-rays, Photoresist materials, Standing waves, Extreme ultraviolet lithography, Film thickness, Reflectivity, Fluorescence

Proceedings Article | 6 June 2023 Poster
Ilias Gaffarov, Jacobus Sturm, Ard Vlooswijk, Paul Heij, Marcelo Ackermann, Igor Makhotkin
Proceedings Volume 12578, 125780L (2023) https://doi.org/10.1117/12.2682704

Proceedings Article | 20 November 2017 Open Access Paper
Proceedings Volume 10564, 105640H (2017) https://doi.org/10.1117/12.2309138

Showing 5 of 38 publications
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