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Michael Hunsweck
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Publications (1)
Proceedings Article | 12 December 2023 Presentation + Paper
Development and production deployment of new laser-based mask writer for optical and EUV applications
Christopher Leavitt, Michael Hunsweck, Florence Eschbach, Yang Liu, Kyle Vogt, Jun Kim, Andrew Sowers, Frank Abboud, Mikael Wahlsten, Robert Eklund, Mats Rosling, Peter Henriksson, Anders Svensson, Fredric Ihren, Youngjin Park
Proceedings Volume PC12751, PC127510T (2023) https://doi.org/10.1117/12.2688097
KEYWORDS: EUV optics, Laser applications, Extreme ultraviolet, Laser development, Critical dimension metrology, Sustainability, Solid state lasers, Solid state electronics, Printing, Power consumption
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