Dr. Richard M. Silver
Physicist / Div Leader at National Institute of Standards and Technology
SPIE Involvement:
Author | Editor
Publications (77)

Proceedings Article | 22 February 2021 Presentation
Richard Silver, Xiqiao Wang, Fan Fei, Jon Wyrick, Ranjit Kashid, Pradeep Namboodiri
Proceedings Volume 11610, 1161018 (2021) https://doi.org/10.1117/12.2586982
KEYWORDS: Chemical species, Quantum dots, Transistors, Physics, Metrology, Systems modeling, Solid state physics, Silicon, Scanning probe lithography, Scanning electron microscopy

Proceedings Article | 21 June 2019 Presentation + Paper
Proceedings Volume 11057, 110570K (2019) https://doi.org/10.1117/12.2525115
KEYWORDS: Silicon, Dielectrics, Metrology, Reflectometry, Anisotropy, Reflectivity, Electrons, Electromagnetism, Data modeling

Proceedings Article | 26 March 2019 Open Access Presentation
Proceedings Volume 10959, 1095903 (2019) https://doi.org/10.1117/12.2517365
KEYWORDS: Quantum computing, Silicon, Manufacturing, Metrology, Quantum communications, Chemical species, Semiconductors, Quantum information, Transmission electron microscopy, Physics

Proceedings Article | 26 March 2019 Presentation + Paper
Proceedings Volume 10959, 109590Z (2019) https://doi.org/10.1117/12.2517285
KEYWORDS: Metrology, Defect detection, Machine learning, Data modeling, Scattering, Performance modeling, Convolutional neural networks, Inspection, Semiconducting wafers, Defect inspection

Proceedings Article | 19 March 2018 Presentation
Proceedings Volume 10585, 1058504 (2018) https://doi.org/10.1117/12.2301076
KEYWORDS: Metrology, Dielectrics, Chemical species, Optical testing, Measurement devices, Scatterometry, Thin films, Semiconductors, Electromagnetism, Scatter measurement

Showing 5 of 77 publications
Proceedings Volume Editor (10)

SPIE Conference Volume | 22 August 2019

SPIE Conference Volume | 27 July 2017

SPIE Conference Volume | 21 June 2015

SPIE Conference Volume | 13 May 2013

SPIE Conference Volume | 23 May 2011

Showing 5 of 10 publications
Conference Committee Involvement (27)
Metrology, Inspection, and Process Control for Microlithography XXXIV
24 February 2020 | San Jose, California, United States
Modeling Aspects in Optical Metrology VII
24 June 2019 | Munich, Germany
Metrology, Inspection, and Process Control for Microlithography XXXIII
25 February 2019 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XXXII
26 February 2018 | San Jose, California, United States
Modeling Aspects in Optical Metrology
26 June 2017 | Munich, Germany
Showing 5 of 27 Conference Committees
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