Dr. Dirk Jürgens Profile

Dr. Dirk Jürgens

System Engineer at Carl Zeiss SMT GmbH

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Author

Publications (8)

Proceedings Article | 10 April 2024 Presentation + Paper

EUV optics at ZEISS: status, outlook, and future

Joachim Kalden, Jens Timo Neumann, Dirk Jürgens, Paul Gräupner, Wolfgang Seitz, Peter Kürz

Proceedings Volume 12953, 129530Q (2024) https://doi.org/10.1117/12.3010847

KEYWORDS: EUV optics, Mirrors, Extreme ultraviolet, Extreme ultraviolet lithography, Scanners, Optics manufacturing, Geometrical optics, Projection systems, Optical transmission, Metrology

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Proceedings Article | 21 November 2023 Paper

Status and outlook of EUV optics at ZEISS

Jörg Zimmermann, Jens Timo Neumann, Dirk Jürgens, Paul Gräupner

Proceedings Volume 12750, 127500O (2023) https://doi.org/10.1117/12.2687658

KEYWORDS: Optics manufacturing, EUV optics, Scanners, Optical resolution, Imaging systems, High volume manufacturing, Projection systems, Mirrors, Metrology, Manufacturing

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Proceedings Article | 5 October 2023 Paper

Emergence of next generation EUV optics: status, outlook and future

Daniel Golde, Björn Butscher, Paul Gräupner, Peter Kürz, Dirk Jürgens, Olaf Conradi, Jan van Schoot, Judon Stoeldraijer

Proceedings Volume 12802, 1280202 (2023) https://doi.org/10.1117/12.2673952

KEYWORDS: Mirrors, Extreme ultraviolet, Design and modelling, Semiconducting wafers, Extreme ultraviolet lithography, EUV optics, Scanners, Reticles, Optics manufacturing, Manufacturing

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Proceedings Article | 1 December 2022 Presentation + Paper

EUV optics at ZEISS: status and outlook

Bartosz Bilski, Dirk Jürgens, Paul Gräupner

Proceedings Volume 12292, 1229204 (2022) https://doi.org/10.1117/12.2645875

KEYWORDS: Projection systems, Optics manufacturing, Lithography, Extreme ultraviolet, EUV optics, Extreme ultraviolet lithography

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Proceedings Article | 15 September 2022 Presentation

PMJ22: EUV lithography in high volume manufacturing

Christian Karlewski, Dirk Juergens, Paul Graeupner

Proceedings Volume 12325, 1232505 (2022) https://doi.org/10.1117/12.2640511

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Proceedings Article | 4 March 2010 Paper

Generation of arbitrary freeform source shapes using advanced illumination systems in high-NA immersion scanners

Jörg Zimmermann, Paul Gräupner, Jens Neumann, Dirk Hellweg, Dirk Jürgens, Michael Patra, Christoph Hennerkes, Manfred Maul, Bernd Geh, Andre Engelen, Oscar Noordman, Melchior Mulder, Sean Park, Joep De Vocht

Proceedings Volume 7640, 764005 (2010) https://doi.org/10.1117/12.847282

KEYWORDS: Diffractive optical elements, Fiber optic illuminators, Reticles, Lithographic illumination, Mirrors, Critical dimension metrology, Distortion, Source mask optimization, Manufacturing, Semiconducting wafers

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Proceedings Article | 4 March 2010 Paper

Performance of FlexRay: a fully programmable illumination system for generation of freeform sources on high NA immersion systems

Melchior Mulder, André Engelen, Oscar Noordman, Gert Streutker, Bert van Drieenhuizen, Cas van Nuenen, Wilfred Endendijk, Jef Verbeeck, Wim Bouman, Anita Bouma, Robert Kazinczi, Robert Socha, Dirk Jürgens, Joerg Zimmermann, Bastian Trauter, Joost Bekaert, Bart Laenens, Daniel Corliss, Greg McIntyre

Proceedings Volume 7640, 76401P (2010) https://doi.org/10.1117/12.845984

KEYWORDS: Mirrors, Diffractive optical elements, Fiber optic illuminators, Source mask optimization, Imaging systems, Electroluminescence, Polarization, Semiconducting wafers, Photomasks, Light

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Proceedings Article | 11 December 2009 Paper

Performance of a programmable illuminator for generation of freeform sources on high NA immersion systems

Melchior Mulder, André Engelen, Oscar Noordman, Robert Kazinczi, Gert Streutker, Bert van Drieenhuizen, Stephen Hsu, Keith Gronlund, Markus Degünther, Dirk Jürgens, Johannes Eisenmenger, Michael Patra, Andras Major

Proceedings Volume 7520, 75200Y (2009) https://doi.org/10.1117/12.837035

KEYWORDS: Mirrors, Fiber optic illuminators, Diffractive optical elements, Source mask optimization, Micromirrors, Light, Metrology, Semiconducting wafers, Switching, Scanners

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Showing 5 of 8 publications

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