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Results are presented which provide information about the correlation between deposition parameters (Assistance, choice of working gas) and the optical properties of the films. Correlations between optical and non-optical (stress, EDXresults) properties are further presented and discussed in terms of classical models. Reproducibility issues are discussed, too.
Silver is a noble metal. However, corrosion activators (e.g. S and Cl) can lead to corrosion. Thus, a protective layer is required to prevent the corrosion and sustain the high reflectivity of the mirror. However, damage of the Ag-coating can occur, even in the case of protected-Ag. Inhomogeneous film growth of the protective layer can lead to a permeation of corrosion activators and thus to a damage of the Ag. But also the deposition of impervious protective layers is not sufficient for long-term environmental stability. Hygroscopic air borne particles can weaken the protection and therefore subsequently lead to a permeation of corrosion activators and thus to a damage of the Ag.
These damage mechanisms lead to criteria for a durable and efficient protection. AlOxNy and nanolaminates have been tested with respect to these criteria. In particular the protection based on nanolaminates shows a great potential for the protection of Ag. In addition, also the optical performance can be improved by UV-enhancement based on different nanolaminates.
Different coating options were evaluated in order to provide the necessary high reflectivity and a satisfactory laser damage threshold for ultrashort laser pulses in the few ps to fs regime at λ = 1030 nm. High-reflective metal layers enhanced by dielectric HfO2/SiO2 stacks were found to be the most advantageous coating option due to their comparatively small thickness and measured damage thresholds above 1 J/cm2@8ps.