Dr. Zhimin Zhu
Sr Scientist at Brewer Science Inc
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 30 November 2023 Presentation + Paper
Reuben Chacko, Steve Murphy, Johannes Woelk, Zhimin Zhu
Proceedings Volume 12778, 127780V (2023) https://doi.org/10.1117/12.2692395
KEYWORDS: Refractive index, Micro optical fluidics, Optical properties, Antireflective coatings, Porosity, Plastics, Scanning electron microscopy, Nanomaterials, Simulations

Proceedings Article | 25 May 2022 Paper
Zhimin Zhu, Joyce Lowes, Shawn Ye, Zhiqiang Fan, Tim Limmer
Proceedings Volume 12055, 120550P (2022) https://doi.org/10.1117/12.2614289
KEYWORDS: Stochastic processes, System on a chip, Lithography, Extreme ultraviolet lithography, Diffusion, Optical lithography, Extreme ultraviolet, Photoresist processing, Printing, Optical imaging

Proceedings Article | 23 March 2020 Presentation + Paper
Xianggui (Shawn) Ye, Joyce Lowes, Zhimin Zhu, Richard Daugherty, Zhiqiang Fan, James Lamb, Tim Limmer, Srikanth Kommu
Proceedings Volume 11326, 1132616 (2020) https://doi.org/10.1117/12.2552929
KEYWORDS: Photoresist materials, Interfaces, Lithography, Silicon, Semiconducting wafers, Computer simulations, Multilayers, Surface properties

Proceedings Article | 23 March 2020 Presentation + Paper
Zhimin Zhu, Joyce Lowes, Shawn Ye, Zhiqiang Fan, Darin Collins, James Lamb, Tim Limmer
Proceedings Volume 11327, 113270J (2020) https://doi.org/10.1117/12.2551934
KEYWORDS: Algorithm development, Semiconducting wafers, Polymer thin films, Polymers, Software development, Optics manufacturing, Scattering, Thin films, Lithography, Coating

Proceedings Article | 20 March 2019 Presentation + Paper
Zhimin Zhu, Xianggui Ye, Sean Simmons, Catherine Frank, Tim Limmer, James Lamb
Proceedings Volume 10961, 109610H (2019) https://doi.org/10.1117/12.2515078
KEYWORDS: Thin films, Polymers, Optical lithography, Polymer thin films, Lithography, Stochastic processes, Absorption, Reflectivity, Etching, Interfaces

Showing 5 of 17 publications
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