Isao Yonekura
Research Leader at Toppan Printing
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 28 June 2013 Paper
Isao Yonekura, Hidemitsu Hakii, Shinya Morisaki, Tsutomu Murakawa, Soichi Shida, Masayuki Kuribara, Toshimichi Iwai, Jun Matsumoto, Takayuki Nakamura
Proceedings Volume 8701, 870110 (2013) https://doi.org/10.1117/12.2031846
KEYWORDS: 3D metrology, Sensors, 3D image processing, Atomic force microscopy, 3D vision, 3D acquisition, Extreme ultraviolet, Scanning electron microscopy, Phase measurement, Electron beams

Proceedings Article | 30 June 2012 Paper
Proceedings Volume 8441, 844108 (2012) https://doi.org/10.1117/12.999462
KEYWORDS: Monte Carlo methods, Extreme ultraviolet, Scanning electron microscopy, Photomasks, Sensors, Metrology, Oxides, Signal detection, Multilayers, Electron beams

Proceedings Article | 14 October 2011 Paper
Mitsuo Hiroyama, Tsutomu Murakawa, Masayuki Kuribara, Toshimichi Iwai, Minoru Soma, Ikuo Iko, Masahiro Seyama, Jun Matsumoto, Takayuki Nakamura, Hidemitsu Hakii, Isao Yonekura, Masashi Kawashita, Yasushi Nishiyama, Keishi Tanaka, Kenji Komoto
Proceedings Volume 8166, 81661R (2011) https://doi.org/10.1117/12.896982
KEYWORDS: Sensors, Signal detection, 3D metrology, Photomasks, Atomic force microscopy, Lithography, Scanning electron microscopy, Image sensors, Edge detection, Extreme ultraviolet

Proceedings Article | 19 May 2011 Paper
Hiroshi Fukaya, Tsutomu Murakawa, Soichi Shida, Masayuki Kuribara, Toshimichi Iwai, Jun Matsumoto, Takayuki Nakamura, Hidemitsu Hakii, Isao Yonekura, Masashi Kawashita, Yasushi Nishiyama, Keishi Tanaka, Yasutaka Kikuchi
Proceedings Volume 8081, 80810G (2011) https://doi.org/10.1117/12.899368
KEYWORDS: Sensors, Signal detection, Photomasks, Algorithm development, 3D metrology, Polonium, Metrology, Scanning electron microscopy, Electron beams, Detection and tracking algorithms

Proceedings Article | 20 April 2011 Paper
Proceedings Volume 7971, 79710C (2011) https://doi.org/10.1117/12.878728
KEYWORDS: Electrons, Extreme ultraviolet, Silica, Monte Carlo methods, Photomasks, Tantalum, Scanning electron microscopy, Critical dimension metrology, Multilayers, Scattering

Showing 5 of 15 publications
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