Dr. Jorge Albero Profile

Dr. Jorge Albero

at FEMTO-ST

SPIE Involvement:

Author

Publications (17)

Proceedings Article | 27 April 2016 Paper

Wafer-level fabrication of arrays of glass lens doublets

Nicolas Passilly, Stéphane Perrin, Jorge Albero, Johann Krauter, Olivier Gaiffe, Ludovic Gauthier-Manuel, Luc Froehly, Justine Lullin, Sylwester Bargiel, Wolfgang Osten, Christophe Gorecki

Proceedings Volume 9888, 98880T (2016) https://doi.org/10.1117/12.2228833

KEYWORDS: Optical components, Polishing, Micro optics, Glasses, Optical aberrations, Semiconducting wafers, Microlens

Read Abstract +

Systems for imaging require to employ high quality optical components in order to dispose of optical aberrations and thus reach sufficient resolution. However, well-known methods to get rid of optical aberrations, such as aspherical profiles or diffractive corrections are not easy to apply to micro-optics. In particular, some of these methods rely on polymers which cannot be associated when such lenses are to be used in integrated devices requiring high temperature process for their further assembly and separation. Among the different approaches, the most common is the lens splitting that consists in dividing the focusing power between two or more optical components. In here, we propose to take advantage of a wafer-level technique, devoted to the generation of glass lenses, which involves thermal reflow in silicon cavities to generate lens doublets. After the convex lens sides are generated, grinding and polishing of both stack sides allow, on the first hand, to form the planar lens backside and, on the other hand, to open the silicon cavity. Nevertheless, silicon frames are then kept and thinned down to form well-controlled and auto-aligned spacers between the lenses. Subsequent accurate vertical assembly of the glass lens arrays is performed by anodic bonding. The latter ensures a high level of alignment both laterally and axially since no additional material is required. Thanks to polishing, the generated lens doublets are then as thin as several hundreds of microns and compatible with micro-opto-electro-systems (MOEMS) technologies since they are only made of glass and silicon. The generated optical module is then robust and provide improved optical performances. Indeed, theoretically, two stacked lenses with similar features and spherical profiles can be almost diffraction limited whereas a single lens characterized by the same numerical aperture than the doublet presents five times higher wavefront error. To demonstrate such assumption, we fabricated glass lens doublets and compared them to single lenses of equivalent focusing power. For similar illumination, the optical aberrations are significantly reduced.

Proceedings Article | 26 April 2016 Paper

Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry

Sylwester Bargiel, Justine Lullin, Patrice Lemoal, Stéphane Perrin, Nicolas Passilly, Jorge Albero, Luc Froehly, Franck Lardet-Vieudrin, Christophe Gorecki

Proceedings Volume 9890, 98900D (2016) https://doi.org/10.1117/12.2230487

KEYWORDS: Micromirrors, Silicon, Interferometry, Optical coherence tomography, Phase shifts, Microopto electromechanical systems, Microactuators, Phase shifting, Mirau interferometers, Semiconducting wafers, Photomasks, Etching

Read Abstract +

Proceedings Article | 26 April 2016 Paper

Vertical integration of array-type miniature interferometers at wafer level by using multistack anodic bonding

Wei-Shan Wang, Maik Wiemer, Joerg Froemel, Tom Enderlein, Thomas Gessner, Justine Lullin, Sylwester Bargiel, Nicolas Passilly, Jorge Albero, Christophe Gorecki

Proceedings Volume 9890, 989011 (2016) https://doi.org/10.1117/12.2229884

KEYWORDS: Semiconducting wafers, Interferometers, Microelectromechanical systems, Microlens, Mirau interferometers, Wafer bonding, Microopto electromechanical systems, Optical coherence tomography, Scanners, Beam splitters, Laser cutting, Gold, Glasses

Read Abstract +

Proceedings Article | 26 April 2016 Paper

Array-type miniature interferometer as the core optical microsystem of an optical coherence tomography device for tissue inspection

Nicolas Passilly, Stéphane Perrin, Justine Lullin, Jorge Albero, Sylwester Bargiel, Luc Froehly, Christophe Gorecki, Johann Krauter, Wolfgang Osten, Wei-Shan Wang, Maik Wiemer

Proceedings Volume 9890, 98900C (2016) https://doi.org/10.1117/12.2229477

KEYWORDS: Skin, Microopto electromechanical systems, Optical coherence tomography, Microsystems, Mirrors, Silicon, Semiconducting wafers, Beam splitters

Read Abstract +

Proceedings Article | 18 August 2014 Paper

Simple setup for optical characterization of microlenses

Stephane Perrin, Maciej Baranski, Nicolas Passilly, Luc Froehly, Jorge Albero, Sylwester Bargiel, Christophe Gorecki

Proceedings Volume 9204, 92040D (2014) https://doi.org/10.1117/12.2061299

KEYWORDS: Microlens, Modulation transfer functions, Imaging systems, Optical components, Microscopes, Objectives, Molybdenum, Wavefronts, 3D metrology, Etching

Read Abstract +

Proceedings Article | 2 May 2014 Paper

Arrays of millimeter-sized glass lenses for miniature inspection systems

J. Albero, S. Perrin, S. Bargiel, M. Baranski, N. Passilly, L. Gauthier-Manuel, C. Gorecki

Proceedings Volume 9130, 91300U (2014) https://doi.org/10.1117/12.2051043

KEYWORDS: Glasses, Microlens, Silicon, Lenses, Inspection, Semiconducting wafers, Fabrication, Matrices, Microlens array, Deep reactive ion etching

Read Abstract +

Proceedings Article | 1 May 2014 Paper

Metrology of micro-optical components quality using direct measurement of 3D intensity point spread function

Maciej Baranski, Stephane Perrin, Nicolas Passilly, Luc Froehly, Sylwester Bargiel, Jorge Albero, Christophe Gorecki

Proceedings Volume 9132, 913216 (2014) https://doi.org/10.1117/12.2051122

KEYWORDS: 3D metrology, Optical components, Objectives, Imaging systems, Point spread functions, Microscopes, Cameras, Microlens, CMOS cameras, High dynamic range imaging

Read Abstract +

Proceedings Article | 1 May 2014 Paper

Optical design of a vertically integrated array-type Mirau-based OCT system

J. Krauter, T. Boettcher, W. Lyda, W. Osten, N. Passilly, L. Froehly, S. Bargiel, J. Albero, S. Perrin, J. Lullin, C. Gorecki

Proceedings Volume 9132, 91320L (2014) https://doi.org/10.1117/12.2054573

KEYWORDS: Optical coherence tomography, Interferometers, Optical design, Skin, Beam splitters, Sensors, Cameras, Imaging systems, Electroluminescent displays, Tissue optics

Read Abstract +

SPIE Journal Paper | 22 May 2013 Open Access

Vortex sensing analysis of radially and pseudo-radially polarized beams

Jeffrey Davis, Don Cottrell, Brandon Schoonover, Johnathan Cushing, Jorge Albero, Ignacio Moreno

OE, Vol. 52, Issue 05, 050502, (May 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.5.050502

KEYWORDS: Polarization, Diffraction gratings, LCDs, Polarizers, Fourier transforms, Liquid crystals, Binary data, Diffraction, Manufacturing, Circular polarizers

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 18 December 2012 Paper

Diffraction efficiency considerations and experimental realization for adaptive phase gratings with liquid crystal panels

Jorge Albero, Pascuala Garcia-Martínez, Jose Luis Martínez, Ignacio Moreno, Juan Campos

Proceedings Volume 8550, 85503C (2012) https://doi.org/10.1117/12.981206

KEYWORDS: Phase shift keying, Phase modulation, Diffraction, Modulation, Diffraction gratings, Spatial light modulators, Liquid crystals, Liquid crystal on silicon, LCDs, Lenses

Read Abstract +

SPIE Journal Paper | 11 December 2012

Polarization manipulation of radially polarized beams

Ignacio Moreno, Jorge Albero, Jeffrey Davis, Don Cottrell, Johnathan Cushing

OE, Vol. 51, Issue 12, 128003, (December 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.12.128003

KEYWORDS: Polarization, Polarizers, Wave plates, Linear polarizers, Beam analyzers, Phase shifts, Optical engineering, Imaging systems, Optical components, Jones vectors

Read Abstract +

Proceedings Article | 13 September 2012 Paper

Micromachined array-type Mirau interferometer for MEMS metrology

C. Gorecki, S. Bargiel, J. Albero, N. Passilly, M. Kujawinska, U. Zeitner

Proceedings Volume 8494, 849403 (2012) https://doi.org/10.1117/12.932226

KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Mirau interferometers, Interferometry, Glasses, Microlens, Interferometers, Micromirrors, Beam splitters, Inspection

Read Abstract +

Proceedings Article | 9 May 2012 Paper

Fabrication of 100% fill factor arrays of microlenses from silicon molds

Maciej Baranski, Nicolas Passilly, Jorge Albero, Christophe Gorecki

Proceedings Volume 8428, 84281G (2012) https://doi.org/10.1117/12.921875

KEYWORDS: Microlens, Etching, Silicon, Microlens array, Lenses, Wet etching, Spherical lenses, Semiconducting wafers, Matrices, Chemical elements

Read Abstract +

Proceedings Article | 14 May 2010 Paper

Next-generation test equipment for micro-production

Kay Gastinger, Lars Johnsen, Malgorzata Kujawinska, Michal Jozwik, Uwe Zeitner, Peter Dannberg, Jorge Albero, Sylwester Bargiel, Christoph Schaeffel, Stephan Beer, Rudolf Moosburger, Patrick Lambelet, Marco Pizzi

Proceedings Volume 7718, 77180F (2010) https://doi.org/10.1117/12.855087

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Imaging systems, Cameras, Mirrors, Lithium, Glasses, Wafer-level optics, Diffraction gratings

Read Abstract +

Proceedings Article | 14 May 2010 Paper

Level set method for microfabrication simulations

Maciej Baranski, Rafal Kasztelanic, Jorge Albero, Lukasz Nieradko, Christophe Gorecki

Proceedings Volume 7716, 77161W (2010) https://doi.org/10.1117/12.853836

KEYWORDS: Etching, Silicon, Data modeling, Microfabrication, Finite element methods, Interfaces, Glasses, Wet etching, Process modeling, Diffusion

Read Abstract +

Proceedings Article | 14 May 2010 Paper

Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS

Jorge Albero, Sylwester Bargiel, Christophe Gorecki, Kay Gastinger

Proceedings Volume 7716, 771621 (2010) https://doi.org/10.1117/12.853907

KEYWORDS: Silicon, Glasses, Etching, Microlens, Inspection, Semiconducting wafers, Interferometers, Interferometry, Anisotropic etching, Spherical lenses

Read Abstract +

Proceedings Article | 14 May 2008 Paper

Si moulds for glass and polymer microlenses replication

J. Albero, L. Nieradko, C. Gorecki, H. Ottevaere, V. Gomez, J. Pietarinen

Proceedings Volume 6992, 69920A (2008) https://doi.org/10.1117/12.783093

KEYWORDS: Etching, Silicon, Microlens, Glasses, Anisotropic etching, Semiconducting wafers, Photomasks, Polymers, Isotropic etching, Optical lithography

Read Abstract +

Showing 5 of 17 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years