Mr. Tod Evan Robinson Profile

Tod Evan Robinson

Research & Development Engineer

SPIE Involvement:

Author

Publications (44)

Proceedings Article | 12 November 2024 Presentation + Paper

Advanced EUV printability simulation study of photomask repair solutions

Tod Robinson

Proceedings Volume 13216, 132160P (2024) https://doi.org/10.1117/12.3034717

KEYWORDS: Extreme ultraviolet, Printing, Photomasks, Reflectivity, Design, Engineering, Ruthenium, Semiconducting wafers

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Proceedings Article | 26 August 2024 Paper

Application of advanced laser repair to legacy photomasks

Tod Robinson, John O'Connor, Marino Romanello, David Doerr

Proceedings Volume 13177, 131770S (2024) https://doi.org/10.1117/12.3032094

KEYWORDS: Photomasks, Deep ultraviolet, Mask cleaning, Laser applications, Pulsed laser operation, Laser systems engineering

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Proceedings Article | 26 August 2024 Paper

AFM nanomachining and clean repair of EUV TaBN and high-k advanced absorber materials

Tod Robinson, Maria Cadena

Proceedings Volume 13177, 131770R (2024) https://doi.org/10.1117/12.3032093

KEYWORDS: Extreme ultraviolet, Atomic force microscopy, Photomasks, Reflectivity, Critical dimension metrology, Contamination

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Proceedings Article | 21 November 2023 Presentation + Paper

AFM nanomachining and clean repair of EUV TaBN advanced absorber material

Maria Cadena, Tod Robinson

Proceedings Volume 12751, 1275106 (2023) https://doi.org/10.1117/12.2686868

KEYWORDS: Extreme ultraviolet, Contamination, Photomasks, Atomic force microscopy, Mask cleaning, Particles, Autoregressive models, Error analysis, Statistical analysis, Metrology

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Proceedings Article | 29 September 2023 Paper

AFM clean and nanomachining repair technology for future mask nodes

Maria Cadena, Tod Robinson

Proceedings Volume 12915, 1291503 (2023) https://doi.org/10.1117/12.2684791

KEYWORDS: Extreme ultraviolet, Atomic force microscopy, Particles, Photomasks, Mask cleaning, Autoregressive models, Ruthenium, Contamination, Printing

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Proceedings Article | 1 December 2022 Presentation + Paper

AFM clean and nanomachining repair technology for future mask nodes

Maria Cadena, Tod Robinson

Proceedings Volume 12293, 1229304 (2022) https://doi.org/10.1117/12.2641799

KEYWORDS: Extreme ultraviolet, Atomic force microscopy, Particles, Photomasks, Scanning electron microscopy, Nanotechnology, Ruthenium, Manufacturing, Deep ultraviolet, Optical lithography

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Proceedings Article | 23 August 2021 Paper

Ongoing development of ultrafast DUV pulse laser repair for EUV photomasks

Tod Robinson, Jeff LeClaire, Iacopo Mochi, Ricarda Maria Nebling, Yasin Ekinci, Dimitrios Kazazis

Proceedings Volume 11908, 119080O (2021) https://doi.org/10.1117/12.2601395

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Proceedings Article | 23 August 2021 Paper

Advanced AFM nanomachining: high aspect repairs

Maria Cadena, Tod Robinson, Marty Klos

Proceedings Volume 11908, 1190803 (2021) https://doi.org/10.1117/12.2601389

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Proceedings Article | 13 October 2020 Poster + Presentation + Paper

Tip wear improvements in advanced nanomachining

Maria Cadena, Marino Romanello, Daniel Yi, Tod Robinson, David Brinkley, Marty Klos

Proceedings Volume 11518, 1151811 (2020) https://doi.org/10.1117/12.2573094

KEYWORDS: Chemistry, Molecular machines, Extreme ultraviolet

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Proceedings Article | 13 October 2020 Presentation + Paper

Next generation nanomachining process technologies

Maria Cadena, Tod Robinson, Marty Klos

Proceedings Volume 11518, 115180C (2020) https://doi.org/10.1117/12.2573093

KEYWORDS: Nanotechnology, Photomasks, Edge detection, Edge roughness

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Proceedings Article | 13 October 2020 Presentation + Paper

Laser repair and clean of extreme ultraviolet lithography photomasks

Tod Robinson, Jeff LeClaire, Iacopo Mochi, Ricarda Maria Nebling, Yasin Ekinci, Dimitrios Kazazis

Proceedings Volume 11518, 1151809 (2020) https://doi.org/10.1117/12.2573084

KEYWORDS: Extreme ultraviolet lithography, Photomasks, Diffractive optical elements, Laser processing, Data modeling, Deep ultraviolet, Ultraviolet radiation, Carbon, Hydrogen, Inspection

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Proceedings Article | 27 June 2019 Paper

Advanced laser repair of EUV photomasks

Tod Robinson, Jeff LeClaire

Proceedings Volume 11178, 111780K (2019) https://doi.org/10.1117/12.2534759

KEYWORDS: Mask cleaning, Femtosecond lasers, Particle contamination, Contamination, Extreme ultraviolet, Photomasks, Laser energy, Particles, Multilayers, Deep ultraviolet, Laser processing, Metrology, Atomic force microscopy, Quartz

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Proceedings Article | 3 October 2018 Presentation + Paper

Ultrashort pulse laser repair of photomasks for advanced lithography technologies

Tod Robinson, Jeff LeClaire

Proceedings Volume 10810, 1081009 (2018) https://doi.org/10.1117/12.2501408

KEYWORDS: Photomasks, Extreme ultraviolet, Particles, Deep ultraviolet, Laser processing, Quartz, Atomic force microscopy, Pulsed laser operation, Laser development

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Proceedings Article | 12 June 2018 Paper

Update on the performance of photomask repair and clean with DUV femtosecond laser processes

Tod Robinson, Jeff LeClaire

Proceedings Volume 10807, 1080709 (2018) https://doi.org/10.1117/12.2325009

KEYWORDS: Photomasks, Deep ultraviolet, Particles, Laser processing, Laser applications, Femtosecond phenomena, Pellicles, Chromium, Opacity, Lithography

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Proceedings Article | 8 October 2014 Paper

Repairing native defects on EUV mask blanks

Mark Lawliss, Emily Gallagher, Michael Hibbs, Kazunori Seki, Takeshi Isogawa, Tod Robinson, Jeff LeClaire

Proceedings Volume 9235, 923516 (2014) https://doi.org/10.1117/12.2069787

KEYWORDS: Photomasks, Extreme ultraviolet, Semiconducting wafers, Image processing, Inspection, Printing, Scanning electron microscopy, Multilayers, Lithography, Mask making

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Proceedings Article | 1 April 2013 Paper

Through-focus EUV multilayer defect repair with nanomachining

Gregory McIntyre, Emily Gallagher, Tod Robinson, Adam Smith, Mark Lawliss, Jeffrey LeClaire, Ron Bozak, Roy White, Michael Archuletta

Proceedings Volume 8679, 86791I (2013) https://doi.org/10.1117/12.2014935

KEYWORDS: Photomasks, Extreme ultraviolet, Atomic force microscopy, Inspection, Printing, Extreme ultraviolet lithography, Semiconducting wafers, Phase shifts, Manufacturing, Calibration

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Proceedings Article | 8 November 2012 Paper

EUVL mask repair: expanding options with nanomachining

Emily Gallagher, Gregory McIntyre, Mark Lawliss, Tod Robinson, Ronald Bozak, Roy White, Jeff LeClaire

Proceedings Volume 8522, 85221L (2012) https://doi.org/10.1117/12.974749

KEYWORDS: Photomasks, Extreme ultraviolet lithography, Multilayers, Extreme ultraviolet, Atomic force microscopy, Near field, Manufacturing, Reflectivity, Inspection, Semiconducting wafers

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Proceedings Article | 30 June 2012 Paper

Applications and development of BitClean technology including selective nanoparticle manipulation

Tod Robinson, David Brinkley, Roy White, Jeff LeClaire, Michael Archuletta, Ron Bozak, Daniel Yi

Proceedings Volume 8441, 84410E (2012) https://doi.org/10.1117/12.964959

KEYWORDS: Nanoparticles, Photomasks, Particles, Inspection, Atomic force microscopy, Contamination, Mathematical modeling, Nanotechnology, Defect inspection, Metrology

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Proceedings Article | 14 October 2011 Paper

Nanomachining repair for the latest reticle enhancement technologies

Tod Robinson, Daniel Yi, David Brinkley, Ken Roessler, Roy White, Ron Bozak, Mike Archuletta, Bernie Arruza

Proceedings Volume 8166, 81662Y (2011) https://doi.org/10.1117/12.898504

KEYWORDS: Photomasks, Atomic force microscopy, Source mask optimization, Manufacturing, Reticles, Lithography, Computational lithography, Optimization (mathematics), Opacity, Resolution enhancement technologies

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Proceedings Article | 14 October 2011 Paper

Productivity of femtosecond DUV laser photomask repair in a real world mask house

Jin-Hong Lin, C. Chen, F. G. Tsai, Tod Robinson, Daniel Yi, Jeff LeClaire, Roy White, Ron Bozak, Mike Archuletta

Proceedings Volume 8166, 81662X (2011) https://doi.org/10.1117/12.898502

KEYWORDS: Photomasks, Deep ultraviolet, Opacity, Pellicles, Femtosecond phenomena, Quartz, Image transmission, Critical dimension metrology, Manufacturing, Chromium

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Proceedings Article | 14 October 2011 Paper

Clean and repair of EUV photomasks

Tod Robinson, Daniel Yi, David Brinkley, Ken Roessler, Roy White, Ron Bozak, Mike Archuletta, David Lee

Proceedings Volume 8166, 81661J (2011) https://doi.org/10.1117/12.898503

KEYWORDS: Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Lithography, Cryogenics, Data modeling, Nanoparticles, Nanotechnology, Autoregressive models

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Proceedings Article | 25 September 2010 Paper

Advanced laser mask repair in the current wafer foundry environment

Tod Robinson, Daniel Yi, Jeff LeClaire, Roy White, Ron Bozak, Mike Archuletta

Proceedings Volume 7823, 782320 (2010) https://doi.org/10.1117/12.864426

KEYWORDS: Photomasks, Deep ultraviolet, Pellicles, Particles, Laser applications, Inspection, Semiconducting wafers, Femtosecond phenomena, Critical dimension metrology, Contamination

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Proceedings Article | 25 September 2010 Paper

Qualification of BitClean technology in photomask production

Tod Robinson, Roy White, Ron Bozak, Mike Archuletta, David Brinkley, Daniel Yi

Proceedings Volume 7823, 782326 (2010) https://doi.org/10.1117/12.864381

KEYWORDS: Particles, Photomasks, Atomic force microscopy, Contamination, Nanoparticles, Scanning electron microscopy, Critical dimension metrology, Manufacturing, Inspection

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Proceedings Article | 27 May 2010 Paper

Nanomachining of non-orthogonal mask patterns

Tod Robinson, Daniel Yi, Roy White, Ron Bozak, Mike Archuletta, David Lee

Proceedings Volume 7748, 77481H (2010) https://doi.org/10.1117/12.865198

KEYWORDS: Photomasks, Autoregressive models, Lithography, Bridges, Quartz, Nanotechnology, Standards development, Edge detection, Software development, Human-machine interfaces

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Proceedings Article | 25 May 2010 Paper

Through-pellicle defect repair for advanced photomasks

Tod Robinson, Roy White, Ron Bozak, Jeff LeClaire, Mike Archuletta, David Lee

Proceedings Volume 7748, 77480G (2010) https://doi.org/10.1117/12.865197

KEYWORDS: Photomasks, Pellicles, Chromium, Deep ultraviolet, Nanoparticles, Inspection, Scanning electron microscopy, Laser development, Particles, Defect inspection

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Proceedings Article | 2 April 2010 Paper

Preliminary results for photomask haze mitigation in a fab environment

Thomas Ku, Jeff LeClaire, Sia Kim Tan, Gek Soon Chua, Ron Bozak, Roy White, Tod Robinson, Michael Archuletta, David Lee

Proceedings Volume 7638, 763817 (2010) https://doi.org/10.1117/12.848283

KEYWORDS: Photomasks, Air contamination, Semiconducting wafers, Reticles, Inspection, Pellicles, Contamination, Manufacturing, Deep ultraviolet, Critical dimension metrology

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Proceedings Article | 23 September 2009 Paper

New tools to enable photomask repair to the 32nm node

Tod Robinson, Roy White, Ron Bozak, Ken Roessler, Bernie Arruza, Dennis Hogle, Mike Archuletta, David Lee

Proceedings Volume 7488, 74880F (2009) https://doi.org/10.1117/12.847238

KEYWORDS: Photomasks, Atomic force microscopy, Nanotechnology, Chromium, Binary data, Extreme ultraviolet, Cryogenics, Molecular bridges, Environmental monitoring

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Proceedings Article | 11 May 2009 Paper

Selective removal of persistent particles with no photomask damage

Tod Robinson, Ron Bozak, Roy White, Mike Archuletta, David Lee

Proceedings Volume 7379, 73791J (2009) https://doi.org/10.1117/12.824296

KEYWORDS: Particles, Photomasks, Contamination, Nanoparticles, Atomic force microscopy, Manufacturing, Inspection, Quartz, Scanning electron microscopy, Air contamination

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Proceedings Article | 17 October 2008 Paper

Analysis of process margin in EUV mask repair with nano-machining

Su-Young Lee, Geun-Bae Kim, Hong-Seok Sim, Sang-Hyeon Lee, Hwa-Sung Kim, Jung-Hwan Lee, Hwan-Seok Seo, Hak-Seung Han, Seong-Sue Kim, Seong-Yong Moon, Sang-Gyun Woo, Ron Bozak, Andrew Dinsdale, Tod Robinson, David Lee, HanKu Cho

Proceedings Volume 7122, 71222I (2008) https://doi.org/10.1117/12.801415

KEYWORDS: Photomasks, Extreme ultraviolet, Error analysis, Extreme ultraviolet lithography, Scanning electron microscopy, Semiconducting wafers, Diffractive optical elements, Image processing, Critical dimension metrology, Factor analysis

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Proceedings Article | 17 October 2008 Paper

Nanomachining photomask repair of complex patterns

Tod Robinson, Andrew Dinsdale, Mike Archuletta, Ron Bozak, Roy White

Proceedings Volume 7122, 71221I (2008) https://doi.org/10.1117/12.801297

KEYWORDS: Photomasks, Optical proximity correction, Atomic force microscopy, Extreme ultraviolet, Cryogenics, Scanning electron microscopy, Lithography, Nanotechnology, Metrology, Autoregressive models

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Proceedings Article | 17 October 2008 Paper

Practical laser mask repair in the contemporary production environment

Tod Robinson, Roy White, Mike Archuletta, Ron Bozak

Proceedings Volume 7122, 71221J (2008) https://doi.org/10.1117/12.801301

KEYWORDS: Pellicles, Deep ultraviolet, Photomasks, Scanning electron microscopy, Bridges, Particles, Airborne remote sensing, Quartz, Inspection, Metrology

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Proceedings Article | 19 May 2008 Paper

Nanomachining processes for 45, 32 nm node mask repair and beyond

Tod Robinson, Andrew Dinsdale, Ron Bozak, Roy White, Michael Archuletta

Proceedings Volume 7028, 70281A (2008) https://doi.org/10.1117/12.793052

KEYWORDS: Particles, Photomasks, Cryogenics, Chromium, Scanning electron microscopy, Atomic force microscopy, Binary data, Image processing, Optical proximity correction, Particle contamination

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Proceedings Article | 30 October 2007 Paper

Advanced mask particle cleaning solutions

Tod Robinson, Andrew Dinsdale, Ron Bozak, Bernie Arruza

Proceedings Volume 6730, 67301Y (2007) https://doi.org/10.1117/12.746748

KEYWORDS: Particles, Photomasks, Cryogenics, Particle contamination, Atomic force microscopy, Scanning electron microscopy, Chromium, Lithography, Inspection, Quartz

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Proceedings Article | 30 October 2007 Paper

Repairing 45 nm node defects through nano-machining

Roy White, Andrew Dinsdale, Tod Robinson, David Brinkley, Jeffrey Csuy, David Lee

Proceedings Volume 6730, 673021 (2007) https://doi.org/10.1117/12.748668

KEYWORDS: Diamond, Atomic force microscopy, Image processing, Quartz, Scanning electron microscopy, Photomasks, Diamond machining, Standards development, Autoregressive models, Chromium

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Proceedings Article | 20 October 2006 Paper

Impact of AFM scan artifacts on photolithographic simulation

Tod Robinson, John Lewellen, David Lee, Peter Brooker

Proceedings Volume 6349, 63491D (2006) https://doi.org/10.1117/12.686376

KEYWORDS: Atomic force microscopy, Photomasks, Chromium, Semiconducting wafers, Metrology, Critical dimension metrology, Solids, Computer simulations, Image transmission, Image analysis

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Proceedings Article | 20 October 2006 Paper

Precise and high-throughput femtopulse laser mask repair of large defects

Roy White, Jeff LeClaire, Tod Robinson, Andrew Dinsdale, Ron Bozak, David Lee

Proceedings Volume 6349, 63494F (2006) https://doi.org/10.1117/12.686361

KEYWORDS: Deep ultraviolet, Laser ablation, Femtosecond phenomena, Chromium, Quartz, Critical dimension metrology, Photomasks, Pulsed laser operation, Microscopes, Image transmission

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As mask complexity has increased and design rules continued to shrink, the manufacturing cost per mask has steadily increased as well. Studies also show that defects are the number one issue for mask yield. Smaller defects are typically addressed through process development, or through photomask repair. The occurrence of large defects often may only be further reduced through use of expensive clean room improvements, like SMIF handling systems. The impact of each large defect therefore increases while the feasibility in their repair decreases as they can span a large number of adjoining densely packed patterns. The presence of sub-resolution features such as scatter bars and the increasing use of embedded phase-shifting masks also complicates the timely repair of such defects. Existing mask repair techniques such as nanomachining, electron beam, or focused ion beam are challenged to produce high yield repairs on such large defects within a reasonable timeframe. Often very complex repairs may in fact take longer than a rewrite of the mask! Deep UV (DUV) femtosecond pulse laser mask repair provides a unique solution to this defect repair need. Methods and results are discussed for the process optimization for the removal of large (5μm) area repair on both Cr and MoSi absorber films on quartz. Additionally, high repair throughput results are shown for unknown contamination removal, and reproduction of ≥1 μm complex unconnected patterns in a single repair run lasting a matter of minutes. Closed-loop CD feedback in-situ with the iterative repair process for such structures can readily result in an edge placement control within ±15 nm. Prior iterative CD closed-loop repairs on specific structures have reliably yielded results within ±10 nm, as confirmed by AIMS CD error, even after aggressive mask wet clean. The nanometer scale dimensional resolution and repeatability of such repairs is shown with the use of sub-pixel resolution automated pattern reconstruction using integrated high-NA DUV microscope imaging.

Proceedings Article | 20 May 2006 Paper

Femtopulse laser-based mask repair in the DUV wavelength regime

Firoz Ghadiali, Vikram Tolani, Rajesh Nagpal, Tod Robinson, Jeff LeClaire, Ron Bozak, David Lee, Roy White

Proceedings Volume 6283, 628329 (2006) https://doi.org/10.1117/12.681779

KEYWORDS: Laser ablation, Deep ultraviolet, Electrons, Photomasks, Femtosecond phenomena, Chromium, Pulsed laser operation, Microscopes, Critical dimension metrology, Absorption

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Proceedings Article | 20 May 2006 Paper

Application of photolithographic simulation and a mask repair system in a production environment

Tod Robinson, John Lewellen, Ron Bozak, David Lee, Peter Brooker

Proceedings Volume 6283, 62832B (2006) https://doi.org/10.1117/12.681782

KEYWORDS: Photomasks, Quartz, Data modeling, Refractive index, Atomic force microscopy, Calibration, Error analysis, Phase shifts, Bridges, Etching

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Proceedings Article | 9 November 2005 Paper

Mask repair for the 65nm technology node

Tod Robinson, Andrew Dinsdale, Ron Bozak, Roy White, David Lee, Ken Roessler

Proceedings Volume 5992, 59924Z (2005) https://doi.org/10.1117/12.634758

KEYWORDS: Photomasks, Chromium, Atomic force microscopy, Statistical analysis, Binary data, Quartz, Feedback control, Control systems, Extreme ultraviolet lithography, Lithography

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Proceedings Article | 5 November 2005 Paper

Integration of photolithographic simulation and a mask repair system into a single concurrent work cell

Tod Robinson, Peter Brooker, Ron Bozak, David Lee

Proceedings Volume 5992, 59921D (2005) https://doi.org/10.1117/12.633160

KEYWORDS: Photomasks, Atomic force microscopy, Chromium, Quartz, Semiconducting wafers, Lithography, Image processing, Computer simulations, Binary data, Solids

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Proceedings Article | 28 June 2005 Paper

Improved cycle time of mask repair by optimizing nanomachining with photolithographic imaging simulation

Peter Brooker, Tod Robinson, John Lewellen, Bob Naber, Ron Bozak, David Lee

Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617346

KEYWORDS: Photomasks, Lithography, Semiconducting wafers, Reticles, Quartz, Phase shifts, Image enhancement, Phase shifting, Image transmission, Chromium

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Proceedings Article | 20 August 2004 Paper

Nano-scale dimensional focused ion beam repair of quartz defects on 90 nm node alternating aperture phase shift masks

Tod Robinson, Anthony Graupera, Troy Morrison, Marcus Ramstein

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557737

KEYWORDS: Quartz, Chromium, Photomasks, Etching, Phase shifts, Ion beams, Process control, Imaging systems, Signal attenuation

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Proceedings Article | 17 December 2003 Paper

Advancements in focused ion beam repair of alternating phase-shift masks

Joshua Lessing, Tod Robinson, Troy Morrision, Theresa Holtermann

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518319

KEYWORDS: Quartz, Etching, Ion beams, Reticles, Photomasks, Phase shifts, Transmittance, Atomic force microscopy, Ions, Resolution enhancement technologies

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Proceedings Article | 28 August 2003 Paper

New advancements in focused ion beam repair of alternating phase-shift masks

Joshua Lessing, Tod Robinson, Rey Brannen, Troy Morrison, Theresa Holtermann

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504211

KEYWORDS: Quartz, Etching, Ion beams, Photomasks, Reticles, Phase shifts, Atomic force microscopy, Transmittance, Ions, Resolution enhancement technologies

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Showing 5 of 44 publications

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